Gas diffusers are ideally suited for vent applications on load lock interfaces or other vacuum chambers where large volumes of gas are flowing in a short amount of time. The Pall ChamberKleen™ 1100 and 5500 Series diffusers combine a stainless steel filter and a unique diffuser membrane that allows flow in 360 degrees. This combination allows large volumes of gas to flow in a uniform manner, limiting the disturbance of particles in the chamber. Consequently, fast vent times can be achieved with little particle disturbance.
- Reduces turbulent gas flow during venting of process chambers
- 360° diffuser design optimizes gas flow
- 316L stainless steel filter medium
- 316L stainless steel diffuser
- Cleanroom manufactured and packaged
Materials
- 316L stainless steel filter medium
- 316L stainless steel diffuser
- Viton1 O-ring
- ≤ 22 μin / 0.56 μm Ra internal surface finish
Removal Rating
- ≥ 0.003 μm
- No particle contribution above background; ≤ 1 particle /(ft3 or m3)
Connections
- 1100 Series: NW25 ISO Vacuum Flange
- 5500 Series: NW63 ISO Vacuum Flange
Operating Conditions
- Design Flow Rate2
- 1100 Series: 15 slpm @ 15 psig / 1 bar inlet and outlet to full vacuum (<10 torr)
- 5500 Series: 150 slpm @ 15 psig / 1 bar inlet and outlet to full vacuum (<10 torr)
- Maximum Operating Temperature
- 1100, 5500 Series: 300°F / 149°C (limited by O-ring flange connection)
Recommended Applications
- Vacuum chamber
- Load lock chamber
1 Viton is a registered trademark of DuPont Dow Elastomers
2 Additional designs are available. Please contact Pall Microelectronics for more information.
Pressure vs. Average Flow Rate
Pressure vs. Chamber Fill Time
Filter Capsules
Dimensions
| Part Number | Description | Design Flow Rate3 (slpm) |
| CK1100I25H | 1100 Series, 316L stainless steel filter, Viton1 O-ring | 0-15 |
| CK5500I63H | 5500 Series, 316L stainless steel filter, Viton O-ring | 0-150 |
3 Reference Design Flow Rate on page 182 of catalog.
Unit conversion: 1 bar = 100 kilopascals
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