The enhanced retention (ER) and improved non-dewetting properties of the UltiKleen G2 Excellar ER filter has enabled semiconductor makers to meet the critical chemical process filtration requirements beyond the 45 nm manufacturing node. Designed for critical single-pass point-of-use filtration, the filter's high flow rate makes it additionally suitable for recirculation bath applications.
The UltiKleen G2 Excellar ER filter media made using Pall's proprietary Molecular Surface Tailoring (MST) technology, imparts non-dewetting properties to the PTFE membrane without adding a chemical layer to the media surface. Inside the membrane, a hyperfine pore matrix provides significantly improved retention of particles down to 20 nanometers in size. The result is a robust, reliable, and chemically clean filter suitable for use in aggressive high temperature cleaning chemistries including aqueous chemistries such as hot SPM, SC-1 and SC-2.
The Me-KleenSMpost conditioning process option reduces total metal ion extractables to a low single digit ppb value.1 Total metal concentrations in 13 elements: Li, Na, Mg, Al, K, Ca, Cr, Mn, Fe, Ni, Cu, Zn, Pb.
The UltiKleen G2 Excellar ER filter media made using Pall's proprietary Molecular Surface Tailoring (MST) technology, imparts non-dewetting properties to the PTFE membrane without adding a chemical layer to the media surface. Inside the membrane, a hyperfine pore matrix provides significantly improved retention of particles down to 20 nanometers in size. The result is a robust, reliable, and chemically clean filter suitable for use in aggressive high temperature cleaning chemistries including aqueous chemistries such as hot SPM, SC-1 and SC-2.
The Me-KleenSMpost conditioning process option reduces total metal ion extractables to a low single digit ppb value.
Features
- Enhanced retention (ER) of particles
- Robust non-dewetting PTFE medium
- High flow rates
- Hyperfine porous media matrix design
- All ultra high purity fluoro-polymer construction
- Low extractables (< 30 ppb1 total in a 5% HCl extraction of 1.5 liters for 24 hours)
- Provided prewet with Full-fill2 UPW package as standard
- 100% integrity tested
- Ultra low metal ion Me-Kleen option
1 Total metal concentrations in 13 elements: Li, Na, Mg, Al, K, Ca, Cr, Mn, Fe, Ni, Cu, Zn, Pb.
2 Package is completely filled with ultrapure water.
Materials of Construction
| Filter medium: | Surface modified PTFE |
| Media support: | PFA/PTFE |
| Inner core: | PFA |
| Outer cage: | PFA |
| End caps: | PFA |
| Housing: | PFA |
| O-ring options: | FEP encapsulated fluoroelastomer |
| Product Name | UltiKleen G2 Excellar ER Filters | UltiKleen G2 Excellar ER KC Assemblies | ||
| Removal Ratings | 15 nm, 20 nm | 15 nm, 20 nm | ||
| Configurations | ABFG1 | ABFG2 | ABFG3 | T-flow, In-line, L-flow (10 in.) |
| Filter Area | 1.9 m2 / 20.5 ft2 | 3.8 m2 / 41.0 ft2 | 5.4 m2 / 61.5 ft2 | 1.9 m2 / 20.5 ft2 |
| Maximum Operating Temperature | 170 ºC / 338 ºF | 170 ºC / 338 ºF | ||
| Maximum Operating Pressure | 0.59 MPaG (85.6 psig) @ 50 ºC / 120 ºF | 0.5 MPaG (73 psig) @ 25 ºC (77 ºF) 0.4 MPaG (58 psig) @ 60 ºC (140 ºF) 0.35 MPaG (51 psig) @ 90 ºC (194 ºF) 0.20 MPaG (29 psig) @ 120 ºC (248 ºF) 0.15 MPaG (22 psig) @ 150 ºC (302 ºF) 0.12 MPaG (17 psig) @ 170 ºC (338 ºF) |
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Dimensions(nominal)
| In-Line | L-Flow | |
 |
 |
|
| T-Flow | T-Flow Downstream Vent | |
 |
 |
Typical Flow Characteristics - 1cP fluid, 20℃
In-line
Filter Capsules
Ordering Information - UltiKleen G2 Excellar ER Filters
Pall Part Number = ABFG [1] GP[2] 3EH1 [3]
Table 1
| Code | Nominal length (mm/in.) |
| 1 | 244/10 |
| 2 | 478/20 |
| 3 | 726/30 |
Table 2
| Code | Removal Rating |
| 15 | 15 nm |
| 20 | 20 nm |
Table 3
| Code | Prewet option |
| -K3 | Prewet filter (packaged in DI water) |
| -K7 | Prewet filter (packaged in DI water), low metal extractables5 |
Ordering Information - UltiKleen G2 Excellar ER KC Assemblies
Pall Part Number = LDF [1] [2] 1GPK [3] [4] E [5] [6]
Table 1
| Code | Downstream venting |
| G | N/A |
| V | Available |
Table 2
| Code | Flow |
| T | T-flow |
| N | In-line |
| L | L-flow |
Table 3
| Code | Removal Rating |
| 15 | 15 nm |
| 20 | 20 nm |
Table 46
| Code | Inlet/outlet | Vent/drain | Memo | |
| Head end | Bowl end | |||
| 12 | 3⁄4 in. male | 1⁄2 in. male | 1⁄2 in. male | T-flow / L-flow |
| 12 | 3⁄4 in. male | 1⁄2 in. male | 1⁄2 in. female | Downstream venting-type |
| 12 | 3⁄4 in. male | 3⁄8 in. male | 3⁄8 in. male | In-line |
| 124 | 3⁄4 in. male | 1⁄4 in. male | 1⁄4 in. male | In-line |
| 128 | 3⁄4 in. male | 1⁄2 in. male | 1⁄2 in. male | Downstream venting-type |
| 13 | 3⁄4 in. female | 1⁄2 in. female | 1⁄2 in. female | T-flow |
| 16 | 1 in. male | 1⁄2 in. male | 1⁄2 in. male | T-flow |
| 16 | 1 in. male | 1⁄2 in. male | 1⁄2 in. female | Downstream venting-type |
| 16 | 1 in. male | 3⁄8 in. male | 3⁄8 in. male | In-line |
| 164 | 1 in. male | 1⁄4 in. male | 1⁄4 in. male | In-line |
| 168 | 1 in. male | 1⁄2 in. male | 1⁄2 in. male | Downstream venting-type |
| 17 | 1 in. female | 1⁄2 in. female | 1⁄2 in. female | In-line |
Table 5
| Code | Connections |
| 0 | No connection |
| 1 | 20 Series (Flowell) |
| 2 | Super Pillar Type (Nippon Pillar)7 |
| 51 | Flare style |
| 6 | FinalLock8 |
| 71 | Super Pillar 300 P Series (Nippon Pillar) |
| 72 | Super Pillar 300 P Series L Type (Nippon Pillar) |
| 8 | 60 Series (Flowell) |
| 9 | 11CR Series (Flowell) |
Table 6
| Code | Prewet option |
| -K3 | Prewet filter (packaged in DI water) |
| -K7 | Prewet filter (packaged in DI water), low metal extractables5 |
5 Please contact Pall for the extractable conditions.
6 Part numbers in combination with all codes are not always available. Please contact Pall for the part number availability.
7 Pillar is a trademark of Nippon Pillar Packing Co.
8 FinalLock is a trademark of Kurabo Industries Ltd.
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