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VaraClean CET Series Filter Cartridges

High-surface-area asymmetric membrane filter cartridge for copper electroplating applications
  • Designed for next generation copper plating chemistries, including 90 nm, 65 nm nodes
  • Compatible with all copper formulations and additive packages
  • Rated at >99.9% efficiency with retention ratings of 0.05 µm and 0.1 µm
  • Proprietary highly asymmetric membrane
  • Contaminant trapped and held by mechanical retention
  • Manufactured in a certified cleanroom and pre flushed with ultrapure 18 megohm-cm water
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High-surface-area asymmetric membrane filter cartridge for copper electroplating applications
  • Designed for next generation copper plating chemistries, including 90 nm, 65 nm nodes
  • Compatible with all copper formulations and additive packages
  • Rated at >99.9% efficiency with retention ratings of 0.05 µm and 0.1 µm
  • Proprietary highly asymmetric membrane
  • Contaminant trapped and held by mechanical retention
  • Manufactured in a certified cleanroom and pre flushed with ultrapure 18 megohm-cm water

Materials of construction

Filter media Highly asymmetric polysulfone membrane
Hardware Polypropylene
Sealing Thermal bond
Support material Polyester
O-rings/gaskets Silicone elastomer, Nordel3, nitrile, FEP encapsulated fluorocarbon elastomer, fluorocarbon elastomer
Dimensions (nominal)
  • Outside diameter: 66 mm (2.6 in)
  • Lengths: 102 mm (4 in.), 254 mm (10 in.), 508 mm (20 in.), 762 mm (30 in.), 1016 mm (40 in.)
3 Nordel is a trademark of The Dow Chemical Company.

Performance Specifications

Filter grades1 0.05 μm, 0.1μm, 0.2 μm
Maximum forward differential pressure
  • 5.5 bard (80 psid) @ 20 °C (68 °F)
  • 1.4 bard (20 psid) @ 95 °C (203 °F)
Recommended change-out differential pressure2 2.4 bard (35 psid)
Chemical compatibility Cartridge resists most acids and bases, pH 1-14, and most oxidizing agents
Rinse-up Cartridges will rinse in to inlet resistivity levels with minimum throughput
1 >99.9% retention rating by standard latex bead challenge.
2 Provided that the maximum differential pressure is not exceeded based on temperature limits defined above.


Liquid Retention Ratings (μm) and Flow Specifications

Cartridge Designation >99.9% Efficiency Typical DI Water Flow mbard / lpm
(psid / gpm) 10 inch Equivalent
VCET050 0.05 9.1 / 0.5
VCET100 0.1 6.0 / 0.33
VCET200 0.2 4.6 / 0.25
Filter Cartridges
This information is a guide to the part number structure and possible options. For availability of specific options and housing details, please contact Pall.

Example Part Number: VCET100-10M3S ( See bold references in tables below)

Part Number:
VCET< Filter Grade Code from Table 1 > - < Cartridge Length Code from Table 2 > < End Configuration Code from Table 3 > < Gasket / O-Ring Material Code from Table 4 >

Table 1 - Filter Grades

Code Filter grades (μm)
050 0.05
100 0.1
200 0.2

Table 2 - Filter Grades

Code Cartridge lengths (cm / in.) nominal
04 10.2 / 4
10 25.4 / 10
20 50.8 / 20
30 76.2 / 30
40 102 / 40

Table 3 - End Configurations

Code End configurations
M2 SOE flat closed end fits 020 O-ring post
M3 SOE flat closed end, external 222 O-rings (retrofits other manufacturers' Code 0)4
M5 DOE internal O-ring (retrofits 213 O-ring style)4
M7 SOE fin end, external 226 O-rings (retrofits other manufacturers' Code 7)4
M8 SOE fin end, external 222 O-rings (retrofits other manufacturers' Code 5)4
M10 DOE internal O-ring (retrofits other manufacturers' housings)4
DOE DOE with elastomer gasket seal & end caps

Table 4 - Gasket / O-Ring materials

Code Gasket / O-Ring materials
S Silicone
E Nordel
V Fluorocarbon elastomer
N Nitrite
F FEP encapsulated fluorocarbon elastomer (O-rings)
T FEP encapsulated silicone (O-rings)
T Encapsulated PTFE (gaskets)
4 For details, contact Pall Corporation.

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