Description
The UltiKleen Excellar ER filters show enhanced retention (ER) and improved non-dewetting properties over previous designs. These properties enable semiconductor makers to meet the chemical process filtration requirements of the 22 nanometer manufacturing node and beyond. The smaller format assemblies are designed for critical single-pass, point-of-use retention. The filter's high flow rate also makes it suitable for recirculation bath applications.
KC disposable assemblies are available with ten inch nominal, (254 mm) filters for higher flow rates.1 The shorter UltiKleen Excellar ER KC assemblies shown here are ideally suited for lower flow point-of-use and single wafer tool applications.
KC disposable assemblies are available with ten inch nominal, (254 mm) filters for higher flow rates.1 The shorter UltiKleen Excellar ER KC assemblies shown here are ideally suited for lower flow point-of-use and single wafer tool applications.
Features
- Provided fully prewet as standard
- Me-KleenSM option for ultra low metal ion extractables
- 100% Integrity tested
- Proprietary non-dewetting surface
- Choice of connection sizes
Benefits
- No need to prewet and flush for safe quick start
- Reduced qualification time in critical clean processes
- Assured filter integrity
- Filter resists drying in outgassing chemistries or after chemical changes
- Sizes to fit existing connections
Specifications
Materials of Construction
| Filter Medium | PTFE |
| Capsule, core, cage, and end caps Filter support and drainage Sealing method | High purity PFA PTFE Proprietary melt seal process |
| Removal Rating | 20 nm, 15 nm |
| Filter Area | 0.9 m2 / 9.7 ft2 |
| Maximum Operating Temperature | 170 °C / 338 °F |
| Maximun forward / reverse differential pressure (gauge)2 | 0.5 MPa (71 psi) @ 25 °C (77 °F) 0.4 MPa (57 psi) @ 60 °C (140 °F) 0.35 MPa (49 psi) @ 90 °C (194 °F) 0.2 MPa (29 psi) @ 120 °C (248 °F) 0.15 MPa (22 psi) @ 150 °C (302 °F) 0.12 MPa (17 psi) @ 170 °C (338 °F) |
1See bulletins MEUKG2EREN
2Reverse pressure is not recommended during normal operation
Performance
Pressure Drop vs. Liquid Flow Rate (Water, 20 °C)3 Clean
3Typical flow rates.
For liquids other than water, multiply the differential pressure by fluid viscosity in centipoise.
Unit conversion: 1 bar = 0.1 MPa
Type
Filter Capsules
Additional Information
Dimensions
Reviews
Earn 10% off* your next order online by leaving a review of this product. Please login to your account to leave a review. We appreciate and value your feedback.
*Subject to Terms and Conditions.
