Description
CMP Profile II Filter Capsules are designed for the filtration of both oxide and metal slurries at chemical mechanical polishing (CMP) tools.
- Compact completely disposable capsule consists of an all polypropylene Profile II filter element in a heat-welded polypropylene shell.
- Profile II filter elements are technologically advanced depth filters with absolute removal ratings. The unique construction with built-in prefiltration assures long service life and consistent high level performance with neither breakthrough of contaminants nor shedding of filter medium.
- The availability of absolute filter removal ratings, from 1 µm to 70 µm assures selection of the capsules to match the range of CMP slurries.
- CMP capsules retain aggregated material and foreign matter and have not been shown to alter slurry polishing characteristics.
Specifications
Materials
- Medium: Continuous polypropylene filament
- Core: Polypropylene
- Shell: Polypropylene
Removal Ratings
- 1 μm, 3 μm, 5 μm, 10 μm, 20 μm, 40 μm, and 70 μm
(Profile filter removal ratings can be 5 – 10 times finer than traditional ratings for depth filters.)
Operating Conditions1
- Maximum Pressure:
- 100 psid/7 bar @ 100 °F / 40 °C
- Maximum Differential Pressure:
- 60 psid/4 bar @ 77 °F / 25 °C
- 30 psid/2 bar @ 140 °F / 60 °C
- Maximum Temperature:
- 140 °F / 60 °C @ 60 psi / 4 bar
Connections
- Inlet/Outlet: 1⁄4 in. NPT
1 Recommendations are based on long term tests in water. Compatibility with other fluids must be checked before use.
Performance
CMP Capsule Pressure Drop2
2 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.
Type
Filter Capsules
Additional Information
Dimensions
Ordering Information
| Part Number | Removal Rating (μm) | Connection |
| CMPY1NN04 | 1 | 1⁄4 in. NPT |
| CMPY1PN04 | 3 | 1⁄4 in. NPT |
| CMPY050N04 | 5 | 1⁄4 in. NPT |
| CMPY100N04 | 10 | 1⁄4 in. NPT |
| CMPY200N04 | 20 | 1⁄4 in. NPT |
| CMPY400N04 | 40 | 1⁄4 in. NPT |
| CMPY700N04 | 70 | 1⁄4 in. NPT |
Unit conversion: 1 bar = 100 kilopascals
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