The PhotoKleen™ EZD-3XL filter is designed for smallvolume dispense systems to meet the requirements of advanced high through-put track systems. The PhotoKleen™ EZD-3XL filter has almost double the filter area (compared to the PhotoKleen™ EZD-3X filter), allowing for lower pressure drop during filtration. Two filter media – Asymmetric Nylon 6,6 and HDPE – are available. The naturally hydrophilic Nylon 6,6 membrane allows for spontaneous wettability, and offers lower defectivity on patterned wafers. The XP option is available for advanced lithography processes.
- Double the filter area compared to PhotoKleen™ EZD-3X filter capsule
- Easy change out capsule style filter assembly
- Two membrane material types available
- Minimized hold-up volume, and top in / top out flow direction
- Offers lower pressure drop for higher viscosity fluids
- Reduces tool down time by extending filter change-outs
- Offers suitable membranes for target applications
- Minimized organic extractables by XP option for rapid start-up and reducing chemical waste
- XP option guarantees low organic, metal and particle cleanliness for the most advanced processes.
Materials of Construction
| Components | Materials |
| Filter Media | P-Nylon : Hydrophilic Asymmetric Nylon 6,6 PE-Kleen: High Density Polyethylene (HDPE) |
| Support and Drainage | High Density Polyethylene (HDPE) |
| Core, Cage, and End Caps | High Density Polyethylene (HDPE) |
| Housing | High Density Polyethylene (HDPE) |
| O-ring | Perfluoroelastomer |
| Removal Ratings | P-Nylon : 2 nm, 5 nm, 10 nm, 20 nm, 40 nm PE-Kleen : 2 nm, 5 nm, 10 nm, 30 nm, 50 nm |
| Filter Area | P-Nylon : 2 nm: 3,200 cm2, 5 nm :2,100 cm2 10, 20, 40 nm : 2,500 cm2 PE-Kleen : 2, 5, 10, 30 nm : 2,800 cm2 50 nm : 2,900 cm2 |
| Maximum Forward Differential Pressure | P-Nylon : 0.27 MPa @ 20 °C / 39 psid @ 60 °F PE-Kleen : 0.29 MPa @ 30 °C / 42 psid @ 86 °F |
| Maximum Operating Temperature | 30 °C / 86 °F |
| Maximum Operating Pressure | 0.29 MPaG @ 30 °C / 42 psig @ 86 °F |
Dimensions 2
2 PhotoKleen™ EZD-3XL filter capsule requires PhotoKleen EZD-3XL head manifold
Typical Flow Characteristics - 1cP fluid, 20℃
Filter Capsules
PHD13 [1] EH11B3
Table 1
| Code | Filter Media | Removal Ratings | |
| XN2L4 | P-Nylon | Asymmetric 6,6 | 2 nm |
| HXN54 | Asymmetric Nylon6,6 | 5 nm | |
| AN01 | Asymmetric Nylon6,6 | 10 nm | |
| ANM | Asymmetric Nylon6,6 | 20 nm | |
| AND | Asymmetric Nylon6,6 | 40 nm | |
| UG2 | PE-Kleen | HDPE | 2 nm |
| UG5 | HDPE | 5nm | |
| UG001 | HDPE | 10 nm | |
| UG003 | HDPE | 30 nm | |
| UG005 | HDPE | 50 nm | |
3 For XP option add –XP to end of part number for below 10nm / 20nm removal ratings.
4 XP treatment is standard on 2nm / 5 nm removal rating.
Caution: For optimal filtration performance, it is recommended to replace your filters at-least once a year. Annual replacements will reduce the potential of any leakages that may result due to prolonged chemical exposure. Pall warrants its filters for a period of 1 year from the date of shipment.Specifications (Head Manifold)
Materials of Construction| Components | Materials |
| Head | PFA / HDPE |
| Fitting | PFA / PCTFE |
| Stage and lever | SUS304 |
| Adapter | SUS304 |
Connections
| Type | Inlet / Outlet | Vent |
| Flowell5 60 series | 1/4” (6.35 x 4.3 mm) Fitting | 4 x 3 mm Fitting |
| 5 x 3 mm Fitting | 5 x 3 mm Fitting | |
5 Flowell is a trademark of Flowell Co.,Ltd.
Part Numbers / Ordering Infomation (Head Manifold)
| Part Number | Inlet / Outlet | Vent |
| PHF13GFS44MWLTA | 1/4” (6.35 x 4.3 mm) Flowell 60 Fitting | 4 x 3 mm Flowell 60 Fitting |
| PHF13GFS55MLTA | 5 x 3 mm Flowell 60 Fitting | 5 x 3 mm Flowell 60 Fitting |
Optional Parts
| Product Name | Part Number | Notes |
| Adapter | PTH9101 | For the placement of other capsules |
| PhotoKleen EZD-3 | ||
| PhotoKleen EZD-3X | ||
| Dummy Capsules (PHDC12H11B, PHDC12H11B-XP+) | ||
| Dummy Capsule | PHDC12H11B | O-ring : Perfluoroelastomer |
| PHDC12H11B-XP+ | O-ring : Perfluoroelastomer, Special Clean Product | |
Dimensions
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