Description
The PhotoKleen flter assembly is a compact capsule assembly designed for clean, simple and safe filter changeout. It is well suited for applications that demand higher purity – such as developer, solvents and photoresist filtration – because it eliminates all polypropylene components. Use of the assembly in systems can improve overall performance. The XP option is available for advanced lithography processes.
Features
- Low hold-up volume
- Vent at highest location
- Drain a lowest location
- Low Pressure drop
- Manufactured in a cleanroom environment
- O-ring less design
- Minimized organic extractables by XP option
- XP option guarantees low organic, metal and particle cleanliness for the most advanced processes.
Benefits
- Faster start-up
- Minimize chemical waste
Specifications
Materials of Construction
| Components | Materials |
| Filter Medium | PE-Kleen P-Nylon |
| Support and Drainage | HDPE ( |
| Shell, Core, Cage and End Caps | HDPE ( |
| PE-Kleen filter | P-Nylon filter | ||||||||||
| Grade | UG2 | UG5 | UG001 | UG003 | XN2L | HXN5 | AN01 | ANM | AND | AN151 | |
| Removal Ratings | 2 nm | 5 nm | 10 nm | 30 nm | 2 nm | 5 nm | 10 nm | 20 nm | 40 nm | 0.15 μm | |
| Filter areas (cm2) | DDF1 | 2,600 | 2,500 | 2,500 | 2,200 | 2,900 | 1,900 | 2,500 | 2,500 | 2,500 | 2,500 |
| DDF2 | 5,200 | 5,200 | 5,100 | 4,400 | 5,900 | 4,100 | 5,300 | 5,300 | 5,300 | - | |
| Maximum Operating Temperature | 30 ˚C / 86 ˚F | ||||||||||
| Maximum Operating Pressure | 290 kPaG @ 30 ˚C / 42 psi @ 86 ˚F | ||||||||||
| Maximum Forward Differential Pressure | 290 kPa @ 30 ˚C / 42 psid @ 86 ˚F | ||||||||||
1 Available for DDF1 configuration only.
Dimensions
Performance
Typical Flow Characteristics - 1cP fluid (20℃)
Ordering Information
Part Numbers / Ordering Information2, 3
DDF [1] [2] E [3]Table 1
| Code | Scale |
| 1 | Small volume |
| 2 | Middle volume |
Table 2
| Code | Medium | Removal Ratings |
| UG2 | HDPE | 2 nm |
| UG5 | HDPE | 5 nm |
| UG001 | HDPE | 10 nm |
| UG003 | HDPE | 30 nm |
| XN2L | Nylon 6,6 | 2 nm |
| HXN5 | Nylon 6,6 | 5 nm |
| AN01 | Nylon 6,6 | 10 nm |
| ANM | Nylon 6,6 | 20 nm |
| AND | Nylon 6,6 | 40 nm |
| AN15 | Nylon 6,6 | 0.15 μm |
Table 3
| Code | Connections Inlet, Outlet / Vent, Drain |
| NP44 | 1⁄4 in. Pillar fitting4 / 1⁄4 in. Pillar fitting |
| FL44 | 1⁄4 in. flare style / 1⁄4 in. flare style |
| FL64 | 3⁄8 in. flare style / 1⁄4 in. flare style |
2 Filter elements may not be available in all configurations. Contact your local Pall representative for availability.
3 For XP option, add –XP to the end of a part number for 10nm / 20nm removal ratings.
(XP treatment is standard for 2nm / 5nm products)
4 Pillar fitting is a trademark of Nippon Pillar Packing Co., Ltd.
Caution: For optimal filtration performance, it is recommended to replace your filters at-least once a year. Annual replacements will reduce the potential of any leakages that may result due to prolonged chemical exposure. Pall warrants its filters for a period of 1 year from the date of shipment.Reviews
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