Description
The Mini Ultramet-L®1100 Series assembly is available with an all 316L stainless steel housing and either a 316L stainless steel or nickel filter. It is designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor grade gases, and is ideally suited for point-of-use applications. The 1100 Series filter is recommended for all applications with process gases that are compatible with 316L stainless steel or nickel. For applications with corrosive gases, such as halogen containing gases, the nickel filter assembly is recommended only if the gas is known to be anhydrous.
- One circumferential weld in entire product
- State-of-the-art 316L stainless steel or nickel medium
- Excellent particle removal efficiency vs. pressure drop
- Accommodates extremely high flow rates for the assembly size
- Excellent gas displacement and desorption characteristics
- High temperature and pressure capabilities
- Compact size
- 100% helium leak tested
- Cleanroom manufactured and packaged
- Housing material meets or exceeds VIM VAR specifications
Specifications
Materials
- Electropolished 316L stainless steel housing
- Housing material meets or exceeds VIM/VAR specifications
- EU Pressure Equipment Directive: Assemblies have been evaluated and designed using SEP per the European Union’s Pressure Equipment Directive 2014/68/EU and are not CE marked.
- ≤ 0.13 μm / 5 μin Ra internal surface finish
- Cr:Fe (1:1) chromium-enriched internal housing surface chemistry
- 316L stainless steel or nickel filter medium
Removal Rating
- ≥ 3 nm
Preconditioned Options
1102 Series
- < 10 ppb moisture contribution (Qualified per SEMASPEC test method #90120397B-STD.)
- < 10 ppb THC contribution (Qualified per SEMASPEC test method #90120396B-STD.)
- < 10 ppb O2 contribution (Qualified per SEMASPEC test method #90120398B-STD.)
- No particle contribution above background ≤ 1 particle / m3 or ft3
Connections
- 1⁄4 in. gasket seal (VCR1 or compatible)
- 1⁄4 in. butt weld (0.89 mm / 0.035 in. wall)
Operating Conditions
- Maximum operating pressure:
- 20.7 MPa @ 38 °C / 3,000 psig @ 100 °F
- 11.6 MPa @ 450 °C / 1,685 psig @ 840 °F
- Maximum allowable differential pressure:
316L stainless steel filter:- 0.86 MPa @ 38 °C / 125 psid @ 100 °F
- 0.41 MPa @ 450 °C / 60 psid @ 840 °F
- 0.69 MPa @ 38 °C / 100 psid @ 100 °F
- 0.41 MPa @ 450 °C / 60 psid @ 840 °F
Particle Removal Characteristics
- 109 particle reduction up to 15 slpm
Leak Rating
- 100% helium leak tested to 10-9 atm•cm3/s
- Design validated to 10-11 atm•cm3/s
1VCR is a trademark of Swagelok Company.
Performance
Pressure Drop vs. Gas Flow Rate
316L Stainless Steel Filter Assembly
Nickel Filter Assembly
Type
Assemblies
Use
Filtration
Additional Information
Dimensions
Ordering Information
| Part Number | Description | Fitting Type | Preconditioned | |
| GLFF1100VMM4 | All 316L stainless steel | 1⁄4 in. gasket seal (VCR or compatible) male / male | 84 / 3.31 | No |
| GLFF1100VFM4 | All 316L stainless steel | 1⁄4 in. gasket seal (VCR or compatible) female inlet / male outlet | 88 / 3.47 | No |
| GLFF1100BW4 | All 316L stainless steel | 1⁄4 in. butt weld, 0.89 mm / 0.035 in wall | 42.5 / 1.75 | No |
| GLFF1102VMM4 | All 316L stainless steel | 1⁄4 in. gasket seal (VCR or compatible) male / male | 84 / 3.31 | Yes |
| GLFN1100VMM4 | Nickel media, 316L stainless steel housing | 1⁄4 in. gasket seal (VCR or compatible) male / male | 84 / 3.31 | No |
| GLFN1100VMF4 | Nickel media, 316L stainless steel housing | 1⁄4 in. gasket seal (VCR or compatible) male inlet / female outlet | 71.1 / 2.80 | No |
| GLFN1100BW4 | Nickel media, 316L stainless steel housing | 1⁄4 in. butt weld, 0.89 mm / 0.035 in. wall | 42.5 / 1.75 | No |
| GLFN1102VMM4 | Nickel media, 316L stainless steel housing | 1⁄4 in. gasket seal (VCR or compatible) male / male | 84 / 3.31 | Yes |
Unit conversion: 100 kilopascals = 1 bar
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