Description
Pall's Gaskleen® Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is ideally suited for integrated gas delivery systems, providing easy access and changeout.
Gaskleen TM 1013 Series Assembly
- 316 L stainless steel housing
- State-of-the-art 316 L stainless steel or nickel filter
- High temperature and pressure capabilities
- Excellent gas displacement and desorption characteristics
- 100% helium leak tested
- Manufactured and packaged in a cleanroom environment
Gaskleen TM 3600 Series Assembly
- 316 L stainless steel housing
- State-of-the-art nickel filter medium
- High temperature and pressure capabilities
- Excellent gas displacement and desorption characteristics
- 100% helium leak tested
- Manufactured and packaged in a cleanroom environment
Gaskleen TM 3101 Series Assembly
- 316L stainless steel housing
- All fluoro-polymer element
- Medium: PTFE
- Core and end caps: PFA 440HP
- O-ring: none
- High temperature and pressure capabilities
- 100% integrity tested
- 100% helium leak tested
- Manufactured and packaged in a cleanroom environment
Specifications
Materials of Construction
| Filter Medium | GTMF1013CC4 : 316L stainless steel GTMF3700CC4 : 316L stainless steel GTMN1013CC4 : Nickel GTMP3101CC4 : PTFE |
| Internal Surface Finish | ≤ 0.13 μm / 5 μin Ra |
| Housing | 316L stainless steel Housing material meets or exceeds VIM/VAR specifications. EU pressure equipment directive: Assemblies have been evaluated and designed using SEP per the European Union’s Pressure Equipment Directive 2014/68/EU and are not CE marked. |
| Internal housing surface chmistry | Cr:Fe (1:1) chromium-enriched |
| Core and end caps (GTMP3101CC4) |
PFA |
| O-ring (GTMP3101CC4) |
FEP encapsulated fluorocarbon |
| Removal Rating | ≥ 3 nm |
| Particle Removal Characteristics | GTMF1013CC4 : 109 particle reduction up to 5 slpm GTMN1013CC4 : 109 particle reduction up to 3 slpm GTMP3101CC4 : 109 particle reduction up to 75 slpm GTMF3700CC4 : 109 particle reduction up to 100 slpm |
| Connections | C-seal, 1 1/8" interface |
| Leak Rating | 100% helium leak tested to 10-9 atm cm3 / sec Design validated to 10-11 atm cm3 / sec |
| Design Pressure (Maximum Operating Pressure) |
3.5 MPa @ 100 ºC / 500 psig @ 212 ºF |
| Maximum Allowable Differential Pressure | GTMF1013CC4 / GTMN1013CC4 / GTMF3700CC4 0.7 MPa @ 38 ºC / 100 psid @ 100 ºF GTMP3101CC4 0.6 MPa @ 121 ºC / 80 psid @ 250 ºF |
Performance
Air Flow vs. Pressure Drop
GTMF1013CC4
GTMN1013CC4
GTMP3101CC4
GTMF3700CC4
Type
Filter Capsules
Additional Information
Dimensions
Ordering Information
| Part Number | Description | Height (mm / in.) |
Shell Diameter (mm / in.) |
Design Flow Rate (slpm) |
| GTMF1013CC4 | All 316 L stainless steel | 35.6 / 1.4 | 22.1 / 0.87 | 0 – 5 |
| GTMN1013CC4 | 316 L stainless steel housing Nickel filter | 35.6 / 1.4 | 22.1 / 0.87 | 0 – 3 |
| GTMP3101CC4 | 316 L stainless steel housing All fluoro-polymer element | 74.5 / 2.93 | 21.7 / 0.85 | 0 – 75 |
| GTMF3700CC4 | All 316 L stainless steel | 74.5 / 2.93 | 21.7 / 0.85 | 0 - 100 |
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