Pall's Gaskleen Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change out.
Gaskleen TM 1013 Series Assembly
- Electropolished 316L stainless steel housing
- State-of-the-art 316L stainless steel or nickel filter medium
- High temperature and pressure capabilities
- Excellent gas displacement and desorption characteristics
- 100% helium leak tested
- Manufactured and packaged in a cleanroom environment
Gaskleen TM 3700 Series Assembly
- Electropolished 316L stainless steel housing
- State-of-the-art 316L stainless steel filter medium
- High temperature and pressure capabilities
- Excellent gas displacement and desorption characteristics
- 100% helium leak tested
- Manufactured and packaged in a cleanroom environment
Materials of Construction
| Filter Medium | GTMF1013F4A: 316L stainless steel GTMN1013F4A: Nickel GTMF3700F4A: 316L stainless steel |
| Internal Surface Finish | ≤ 5 μin / 0.13 μm Ra |
| Housing | Electropolished 316L stainless steel Housing material meets or exceeds VIM/VAR specifications. |
| Internal housing surface chemistry | Cr:Fe (1:1) chromium-enriched |
| Removal Rating | ≥ 3 nm |
| Particle Removal Characteristics | GTMF1013F4A: 109 particle reduction up to 5 slpm GTMN1013F4A: 109 particle reduction up to 3 slpm GTMF3700F4A: 109 particle reduction up to 100 slpm |
| Connections | W-seal, 1 1/8" interface |
| Leak Rating | 100% helium leak tested to 10-9 atm cm3 / sec Design validated to 10-11 atm cm3 / sec |
| Maximum Operating Pressure | 3.4 MPa @ 100 ºC / 500 psig @ 212 ºF |
| Maximum Allowable Differential Pressure | 0.69 MPa @ 40 ºC / 100 psid @ 104 ºF |
| EU pressure equipment directive | Assemblies have been evaluated and designed using SEP per the European Union’s Pressure Equipment Directive 2014/68/EU and are not CE marked. |
Pressure Drop vs. Gas Flow Rate
F1013
F3700
Filter Capsules
Dimensions
F1013
| Part Number | Description | Height |
|
| GTMF1013F4A | All 316L stainless steel | 36.8 / 1.45 | 0 - 5 |
| GTMN1013F4A | 316L stainless steel housing Nickel filter | 40.2 / 1.45 | 0 - 3 |
| GTMF3700F4A | 316L stainless steel | 79.3 / 3.12 | 0 - 100 |
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