Description
Pall's Gaskleen Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change out.
- 316L stainless steel housing
- State-of-the-art nickel filter medium
- High temperature and pressure capabilities
- Excellent gas displacement and desorption characteristics
- 100% helium leak tested
- Manufactured and packaged in a cleanroom environment
- No downstream welds
- Minimum downstream volume
Specifications
Materials
- 316L stainless steel housing
- State-of-the-art nickel filter
- Housing meets or exceeds typical VIM / VAR specifications
- Cr:Fe (1:1) chromium-enriched internal surface chemistry
- ≤ 10 μin / 0.25 μm Ra internal surface finish
Removal Rating
- ≥ 3 nm
Particle Removal Characteristics
- 109 particle reduction at rated flow of 100 slpm
Connections
- C-Seal, 11⁄2 in. interface
Leak Rating
- 100% helium leak tested to 10-9 atm•cm3/s
- Design validated to 10-11 atm•cm3/s
Operating Conditions
- Maximum operating pressure: 5.2 MPa @ 100 °C / 750 psig @ 212 °F
- Maximum allowable differential pressure: 0.69 MPa @ 38 °C / 100 psid @ 100 °F
Performance
Pressure Drop vs. Gas Flow Rate*
![Pressure Drop vs. Gas Flow Rate Pressure Drop vs. Gas Flow Rate](/INTERSHOP/static/WFS/PALL-PALLUS-Site/-/PALL/en_US/images/Microelectronics/gaskleen_tm_112cseal_chart1.jpg)
Type
Filter Capsules
Additional Information
Dimensions
![Dimensions Dimensions](/INTERSHOP/static/WFS/PALL-PALLUS-Site/-/PALL/en_US/images/Microelectronics/gaskleen_tm_112cseal_chart2.jpg)
Ordering Information
Part Number | Description | |||
GTMN4600CC4 | 316L stainless steel housing Nickel filter | 75.9 / 2.99 | 33.8 / 1.33 | 0 – 100 |
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