The Ultramet-L® 5500 Series Filter Assembly is an all 316L stainless steel filter designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor process gases.
- All 316L stainless steel construction
- State-of-the-art 316L stainless steel media
- Excellent particle removal efficiency versus pressure drop
- Excellent gas displacement and desorption characteristics
- High temperature capabilities
- Compact size
- 100% helium leak tested
- Clean room manufactured and packaged
- Available preconditioned
- CE marked in accordance with PED 97/23/EC
| Filter Medium | 316L stainless steel |
| Internal Surface Finish | 5500: ≤ 10 μin / 0.25 μm Ra 5502: ≤ 0.7 μm Rmax |
| Housing | Electropolished 316L stainless steel Housing material meets or exceeds VIM / VAR specifications |
| Removal Rating | ≥ 3 nm |
| Particle Removal Characteristics | 109 particle reduction up to 150 slpm |
| Preconditioned Option1 (5502 Series) |
< 10 ppb moisture contribution (Qualified per SEMASPEC test method #90120397B-STD) |
| < 10 ppb thc contribution (Qualified per SEMASPEC test method #90120396B-STD) | |
| < 10 ppb 02 contribution (Qualified per SEMASPEC test method #90120398B-STD) | |
| No particle contribution above background ≤ 1 particle / (ft3 or m3) | |
| Connections | 1⁄4" Gasket Seal Male / Male (VCR2 or compatible) |
| 1⁄4" Butt Weld Male / Male (0.035" / 0.89 mm wall) | |
| 1⁄2" Gasket Seal Male / Male (VCR or compatible) | |
| 1⁄2" Butt Weld (0.049" / 1.24 mm wall) | |
| Maximum Operating Pressure | 750 psig @ 100 °F / 51.7 bar @ 38 °C 550 psig @ 800 °F / 38 bar @ 426 °C for inert gases only |
| Maximum Allowable Differential Pressure | 75 psid @ 68 °F / 5.2 bar @ 20 °C |
| Leak Rating | 100% helium leak tested to 10-9 atm•cm3/s |
| Design validated to 10-11 atm•cm3/s | |
| EU pressure equipment directive | Assemblies have been evaluated and are CE marked per the European Union’s Pressure Equipment Directive 2014/68/EU |
1 The 5500 Series Filter Assembly is also available with a nickel filter. Contact Pall Microelectronics for more information.
2 VCR is a registered trademark of Swagelok Co.
Pressure Drop vs. Gas Flow Rate
Assemblies
Filtration
Dimensions
| Part Number | Description | Fitting Type | Preconditioned | |
| GLFF5500VMM4 | All 316L Stainless Steel | 1⁄4 in. Gasket Seal (VCR or Compatible) Male/Male | 5.00 / 127 | No |
| GLFF5500VMM8 | All 316L Stainless Steel | 1⁄2 in. Gasket Seal (VCR or Compatible) Male/Male | 5.00 / 127 | No |
| GLFF5500BW4 | All 316L Stainless Steel | 1⁄4 in. Butt Weld, 0.035 in. / 0.89 mm wall | 2.50 / 64 | No |
| GLFF5500BW8 | All 316L Stainless Steel | 1⁄2 in. Butt Weld, 0.049 in. / 1.24 mm wall | 2.50 / 64 | No |
| GLFF5502VMM4 | All 316L Stainless Steel | 1⁄4 in. Gasket Seal (VCR or Compatible) Male/Male | 5.00 / 127 | Yes |
| GLFF5502VMM8 | All 316L Stainless Steel | 1⁄2 in. Gasket Seal (VCR or Compatible) Male/Male | 5.00 / 127 | Yes |
| GLFF5502BW4 | All 316L Stainless Steel | 1⁄4 in. Butt Weld, 0.035 in. / 0.89 mm wall | 2.50 / 64 | Yes |
| GLFF5502BW8 | All 316L Stainless Steel | 1⁄2 in. Butt Weld, 0.049 in. / 1.24 mm wall | 2.50 / 64 | Yes |
| SGLFF5500VMM4 | All 316L Stainless Steel | 1⁄4 in. Gasket Seal (VCR or Compatible) Male/Male | 3.31 / 84 | No |
| SGLFF5500VMM8 | All 316L Stainless Steel | 1⁄2 in. Gasket Seal (VCR or Compatible) Male/Male | 3.31 / 84 | No |
| SGLFF5502VMM4 | All 316L Stainless Steel | 1⁄4 in. Gasket Seal (VCR or Compatible) Male/Male | 3.31 / 84 | Yes |
| SGLFF5502VMM8 | All 316L Stainless Steel | 1⁄2 in. Gasket Seal (VCR or Compatible) Male/Male | 3.31 / 84 | Yes |
Unit conversion: 1 bar = 100 kilopascals
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