Description
The Gaskleen V filter assembly is Pall’s latest generation gas filter assembly, designed to provide filtration of ultrahigh-purity semiconductor process gases. Our patented O-ring less design eliminates the need for an elastomeric seal. As a result, there are no downstream (wetted surface) welds.
The preconditioned option provides the cleanest PTFE filter assemblies available.
The preconditioned option provides the cleanest PTFE filter assemblies available.
- 316L stainless steel housing
- All-fluoro-polymer filter element
- High temperature and pressure resistance
- 100% helium leak tested
- Manufactured and packaged in a cleanroom environment.
Specifications
Materials of Construction
| Filter Medium | PTFE |
| Support | Fluoropolymer |
| Core and End caps | PFA |
| Internal Surface Finish | ≤ 0.18 μm / 7 μin Ra ≤ 0.51 μm / 20 μin Ra |
| Housing | Electropolished 316L stainless steel Housing material meets or exceeds VIM/VAR specifications. EU pressure equipment directive: Assemblies have been evaluated and designed using SEP per the European Union’s Pressure Equipment Directive 2014/68/EU and are not CE marked. |
| Internal Housing Surface Chemistry | Cr:Fe (≥1.2:1) chromium-enriched |
| Removal Rating1 | ≥ 3 nm |
| Preconditioned Cleanliness Option | < 10 ppb moisture contribution < 10 ppb total hydrocarbon (THC) contribution < 10 ppb oxygen (O2) contribution |
| Connections | 1⁄4 in, 1⁄2 in or 3/4 in Gasket Seal (VCR2 or compatible) 1⁄4 in 3/8 in or 1⁄2 compression fitting |
| Leak Rating | 100% helium leak tested to 10-9 atm cm3/sec Design validated to 10-11 atm cm3/sec |
| Design Pressure (Maximum Operating Pressure) | 5.2 MPa @ 140 ºC / 750 psig @ 284 ºF |
| Maximum Allowable Differential Pressure | 0.7 MPa @ 20 ºC / 100 psid @ 68 ºF |
| Maximum Allowable Reverse Differential Pressure | 0.34 MPa @ 20 ºC / 50 psid @ 68 ºF |
1 Particle rating based on laboratory testing with NaCl aerosol.
2 VCR is a trademark of Swagelok Co.
Performance
Pressure Drop vs. Gas Flow Rate
Type
Filter Capsules
Additional Information
Dimensions
Unit conversion: 100 kilopascals = 1 bar
Ordering Information
| Part Number3 | Description | Preconditioned | |
| SGLFPF6501VMM4 | 1⁄4 in. Gasket seal, (VCR or compatible) male / male | 127 / 5.0 | No |
| SGLFPF6502VMM4 | 1⁄4 in. Gasket seal, (VCR or compatible) male / male | 127 / 5.0 | Yes |
| SGLFPF6501VMM8 | 1⁄2 in. Gasket seal, (VCR or compatible) male / male | 127 / 5.0 | No |
| SGLFPF6502VMM8 | 1⁄2 in. Gasket seal, (VCR or compatible) male / male | 127 / 5.0 | Yes |
| SGLFPF6501VMM12 | 3⁄4 in. Gasket seal, (VCR or compatible) male / male | 140 / 5.5 | No |
| GLFPF6501VMF4 | 1⁄4 in. Gasket seal, (VCR or compatible) male / female | 141 / 5.6 | No |
| SGLFPF6501SM4 | 1⁄4 in. Compression seal, (Swagelok4 or compatible) male / male | 113 / 4.4 | No |
| GLFPF6501SM4 | 1⁄4 in. Compression seal, (Swagelok or compatible) male / male | 141 / 5.6 | No |
| SGLFPF6501SM6 | 3⁄8 in. Compression seal, (Swagelok or ccompatible) male / male | 118 / 4.6 | No |
| GLFPF6501SM6 | 3⁄8 in. Compression seal, (Swagelok or compatible) male / male | 148 / 5.8 | No |
| SGLFPF6501SM8 | 1⁄2 in. Compression seal, (Swagelok or compatible) male / male | 119 / 4.7 | No |
4 Swagelok is a trademark of Swagelok Co.
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