UltiKleen G2 Excellar ERL Filter
The enhanced retention (ER) and improved nondewetting properties of the UltiKleen G2 Excellar ERL filter have enabled semiconductor makers to meet the critical chemical process filtration requirements beyond the 45 nanometers (nm) manufacturing node. Designed for critical single-pass point-of-use filtration, the filter’s high flow rate also makes it suitable for recirculation bath applications.
An advanced media support design maximizes the effective filter area of the cartridge. The larger filter area increases dirt-holding capacity, thereby extending service life. The liquid flow rate of the UltiKleen G2 Excellar ERL filter is more than 30% higher than that of the standard UltiKleen Excellar ER filter.
The UltiKleen G2 Excellar ERL filter medium is made using Pall’s proprietary Molecular Surface Tailoring (MST) technology. MST imparts nondewetting properties to the PTFE membrane without adding a chemical layer to the surface of the medium. A hyperfine pore matrix inside the membrane provides significantly improved retention of particles down to 20 nm. The result is a robust, reliable and chemically clean filter suitable for use in aggressive high-temperature cleaning chemistries, including aqueous chemistries such as hot SPM, SC-1 and SC-2.
The Me-Kleen℠ post-conditioning process is an option that is available to reduce total metal ion extractables to a low single digit ppb value.
- Enhanced retention of particles
- Robust nondewetting PTFE medium
- High flow rates
- Hyperfine porous media matrix design
- All ultra-high-purity fluoro-polymer construction
- Provided prewet, with Full-fill1ultrapure water package (standard)
- Low extractables ( < 30 ppb 2 in a 5% HCL extraction of 1.5 liters for 24 hours)
- 100% integrity tested
- Ultralow metal ion Me-Kleen option
UltiKleen G2 Excellar ERL KC Assemblies
The Pall UltiKleen G2 KC assemblies, which are made of high-purity PFA, are completely disposable filter units that contain UltiKleen Excellar ERL cartridges. They are specifically designed and ideally suited for high-temperature process chemicals, particularly mixtures of sulfuric acid and hydrogen peroxide (SPM). The unique downstream venting-type assemblies allow bubbles to exhaust from chemicals efficiently and provide higher particle cleanliness levels.
- Downstream venting available
- Disposable filter unit with filter cartridge integrally sealed in housing
- Sealed assembly for safer handling and faster changeout
1 Package is completely filled with ultrapure water.
2 Total metal concentrations in 13 elements: Li, Na, Mg, Al, K, Ca, Cr, Mn, Fe, Ni, Cu, Zn, Pb.
Materials of Construction
| Filter medium | Surface-modified PTFE |
| Media support | PTFE / PFA |
| Core, cage and end caps | PFA |
| Sealing method | Melt seal |
| Housing | PFA |
| O-ring options | FEP-encapsulated fluoroelastomer |
Removal Ratings and Operating Conditions
| UltiKleen G2 Excellar ERL Filter | UltiKleen G2 Excellar ERL KC Assemblies | |||
| ABFG1 | ABFG2 | ABFG3 | T-flow, in-line, L-flow (10 in.) | |
| Removal rating | 15 nm, 20 nm | |||
| Filter area | 3 m2 / 32.3 ft2 | 6 m2 / 64.6 ft2 | 9 m2 / 96.9 ft2 | 3 m2 / 32.3 ft2 |
| Maximum operating temperature | 180˚C / 356˚F | |||
| Maximum operating pressure | 0.59 MPaG (85.6 psig) @ 50˚C (120˚F) | 0.5 MPaG (72.5 psig) @ 25˚C (77˚F) 0.4 MPaG (58 psig) @ 60˚C (140˚F) 0.35 MPaG (50.7 psig) @ 90˚C (194˚F) 0.20 MPaG (29 psig) @ 120˚C (248˚F) 0.15 MPaG (21.8 psig) @ 150˚C (302˚F) 0.12 MPaG (17.4 psig) @ 170˚C (338˚F) |
||
Dimensions (nominal)
UltiKleen G2 Excellar ERL KC Assemblies
| In-Line | L-Flow |
 |
 |
| T-Flow | T-Flow Downstream Vent |
 |
 |
Dimensions by Configuration
UltiKleen G2 Excellar ERL KC Assembly (LDFG / LDFV )
| In-line | Nominal Length (L) (mm / in.) |
T-Flow | Nominal Length (L) (mm / in.) |
VT style | Nominal Length (L) (mm / in.) |
L-flow | Nominal Length (L) (mm / in.) |
VL style | Nominal Length (L) (mm / in.) |
| 12E2 | 396.5 / 15.6 | 12E2 | 408 / 16.1 | 12E2 | 377 / 14.8 | 12E2 | 408 / 16.1 | 12E2 | 440 / 17.35 |
| 12E51 | 412 / 16.2 | 12E71 | 403 / 15.9 | 128E2 | 385 / 15.2 | ||||
| 124E51 | 412 / 16.2 | 13E0 | 495 / 19.5 | 12E71 | 377 / 14.8 | ||||
| 16E8 | 428 / 16.9 | 13E1 | 432 / 17 | ||||||
| 16E51 | 436 / 17.2 | 13E2 | 442 / 17.4 | 128E71 | 402 / 15.8 | ||||
| 17E0 | 448 / 17.6 | 13E6 | 416 / 16.4 | 128E72 | 402 / 15.8 | ||||
| 17E1 | 445 / 17.7 | 13E9 | 433 / 17.1 | 13E1 | 445 / 17.5 | ||||
| 17E51 | 442 / 17.4 | 13E51 | 473 / 18.6 | 13E51 | 444 / 17.4 | ||||
| 17E71 | 462 / 18.2 | 13E71 | 444 / 17.5 | 168E71 | 403 / 15.9 | ||||
| 168E72 | 403 / 15.9 | ||||||||
Typical Flow Characteristics – 1 cP fluid, 20 °C
UltiKleen G2 Excellar ERL Filter
ABFG [1] GP [2] L3EH1[3]Table 1
| Code | Length (Nominal) mm / in. |
| 1 | 244 / 10 |
| 2 | 487 / 20 |
| 3 | 726 / 30 |
Table 2
| Code | Removal Rating |
| 15 | 15 nm |
| K | 20 nm |
Table 3
| Code | Prewet Option |
| -K3 | Prewet filter (packaged in DI water) |
| -K7 | Prewet filter (packaged in DI water), low metal extractables5 |
5 Contact your local Pall representative for information about extractables .
UltiKleen G2 Excellar ERL KC Assemblies6
LDF [1] [2] 1GP [3] L [4] E[5] [6]Table 1
| Code | Downstream Vent |
| G | N/A |
| V | Available |
Table 2
| Code | Flow |
| T | T-flow |
| N | In-line |
| L | L-flow |
Table 3
| Code | Removal Rating |
| 15 | 15 nm |
| K | 20 nm |
Table 4
| Code | Inlet / Outlet | Vent / Drain | Type | |
| Head End | Bowl End | |||
| 12 | 3⁄4 in. male | 1⁄2 in. male | 1⁄2 in. male | T-flow / L-flow |
| 12 | 3⁄4 in. male | 1⁄2 in. male | 1⁄2 in. female | Downstream venting type |
| 12 | 3⁄4 in. male | 3⁄8 in. male | 3⁄8 in. male | In-line |
| 124 | 3⁄4 in. male | 1⁄4 in. male | 1⁄4 in. male | In-line |
| 128 | 3⁄4 in. male | 1⁄2 in. male | 1⁄2 in. male | Downstream venting type |
| 13 | 3⁄4 in. female | 1⁄2 in. female | 1⁄2 in. female | T-flow |
| 16 | 1 in. male | 1⁄2 in. male | 1⁄2 in. male | T-flow |
| 16 | 1 in. male | 1⁄2 in. male | 1⁄2 in. female | Downstream venting type |
| 16 | 1 in. male | 3⁄8 in. male | 3⁄8 in. male | In-line |
| 164 | 1 in. male | 1⁄4 in. male | 1⁄4 in. male | In-line |
| 168 | 1 in. male | 1⁄2 in. male | 1⁄2 in. male | Downstream venting type |
| 17 | 1 in. female | 1⁄2 in. female | 1⁄2 in. female | In-line |
Table 5
| Code | Connections |
| 0 | None |
| 1 | Flowell7 20 series |
| 2 | Super Pillar8 type |
| 51 | Flare style |
| 6 | FinalLock9 |
| 71 | Super Pillar 300 P series |
| 72 | Super Pillar 300 P series L type |
| 8 | Flowell 60 series |
| 9 | Flowell 11CR series |
Table 6
| Code | Prewet Option |
| -K3 | Prewet filter (packaged in DI water) |
| -K7 | Prewet filter (packaged in DI water), low metal extractables6 |
6 Disposable capsules are not available with every option. (Refer to codes for options.) Contact your local Pall representative for option availability.
7 Flowell is a trademark of Flowell Corporation.
8 Super Pillar is a trademark of Nippon Pillar Packing Co., Ltd.
9 FinalLock is a trademark of Kurabo Industries Ltd.
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