Description
Lithography Filter for Leading-edge Process
The PhotoKleen™ NTD filter capsule is designed for aggressive organic solvent applications, in advanced, high through-put track systems.
It is available in three filter configurations designed for point of use on advanced track systems (PhotoKleen EZD3X / PHF12, Photokleen EZD3XL / PHF13) and for chemical cabinet feed system (PhotoKleen EZD / PHF23)
The PhotoKleen™ NTD filter utilizes an all fluoropolymer construction for the ultimate compatibility and cleanliness. It also offers extremely low pressure drop.
Features
- Easy change out style filter capsule
- Minimized hold-up volume, and top in / top out flow direction, with inlet flow stream down to the bottom
- Guaranteed metal, particle and organic cleanliness1
Benefits
Offers extremely low delta-P, enabling use in higher viscosity fluids
Reduces tool down time during filter start up and change out
Offers optimized membrane for target application
1 Contact Pall technical service for device claims
Specifications
Materials of Construction
| Components | Materials2 |
| Filter Medium | Functionalized PTFE |
| Support and Drainage | PFA |
| Core, Cage and End Caps | PFA |
| Housing | PFA |
| O-ring |
Perfluoroelastomer |
2 All fluoropolymer materials made without PFOA
| Removal Ratings | 5 nm |
| Filter Areas | PHF12 : 1,200 cm2 PHF13 : 2,400 cm2 PHF23 : 2,400 cm2 |
| Maximum Operating Temperature | PHF12, PHF13 : 30 °C / 86 °F PHF23 : 23 °C / 73 °F |
| Maximum Operating Pressure | PHF12, PHF13 : 0.29 MPaG @ 30 °C /42 psig @ 86 °F PHF23 : 0.39 MPaG @ 23 °C /57 psig @ 73 °F |
Typical Flow Characteristics - 1cP fluid, 20℃
Type
Ordering Information
PHF23NTD2EH11
| PhotoKleen™ NTD PHF12NTD2EH11B requires PhotoKleen™ EZD-3 head manifold |
PhotoKleen™ NTD PHF23NTD2EH11 requires PhotoKleen™ EZD head manifold |
 |
 |
| PhotoKleen™ EZD3 head Manifold (PHF1 Type) | PhotoKleen™ EZD head Manifold (PHYG type) |
Dummy Capsules
Part Numbers / Ordering Information
PHFC1H11B (for PhotoKleenTM EZD-2, 3 manifolds)
PHFC2H11 (for PhotoKleenTM EZD manifolds)
Specifications
Materials of Construction| Components | Materials |
| Housing | PFA |
| O-ring | Perfluoroelastomer |
| Available head manifold | PHFC1 : Fits into the PhotoKleenTM EZD2/3 manifolds PHFC2 : Fits into the PhotoKleenTM EZD manifolds |
| Hold up volume | PHFC1 : 1 mL PHFC2 : 14 mL |
| Maximum Operating Temperature | PHFC1 : 30 °C / 86 °F PHFC2 : 23 °C / 73 °F |
| Maximum Operating Pressure | PHFC1 : 0.29 MPa @ 30 °C / 42 psi @ 86 °F PHFC2 : 0.39 MPa @ 23 °C / 57 psi @ 73 °F |
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