Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

CTRG AB3 PROFILE C7 005H4 W product photo
Product ID: AB3Y0057WH4
Unit of Measure
1/EA
Min Order Qty
1
Profile® II Filter Cartridges, Polypropylene, Length 20 inches product photo
Product ID: AB2Y0037PH4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
506 mm
Cartridge Length (Metric)
50.6 cm
See All Attributes
Profile® II Filter Cartridges, Polypropylene, Length 20 inches, EPDM product photo
Product ID: AB2Y1007J
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
506 mm
Cartridge Length (Metric)
50.6 cm
See All Attributes
Profile® II Filter Cartridges, Polypropylene, Length 20 inches, silicone product photo
Product ID: AB2Y4007H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
506 mm
Cartridge Length (Metric)
50.6 cm
See All Attributes
AB3Y0107WH4 product photo
Product ID: AB3Y0107WH4
Unit of Measure
1/EA
Min Order Qty
1
AB3Y0107WJ product photo
Product ID: AB3Y0107WJ
Unit of Measure
1/EA
Min Order Qty
1
AB3Y0507WH4 product photo
Product ID: AB3Y0507WH4
Unit of Measure
1/EA
Min Order Qty
1
7 Items
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data sheets