Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Claris®

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings

Product ID: CLR1030M7S
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
See All Attributes
Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end, external 222 O-rings product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end, external 222 O-rings

Product ID: CLR1040M3N
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
See All Attributes
Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Nitrile, DOE with elastomer gasket seals & end caps product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Nitrile, DOE with elastomer gasket seals & end caps

Product ID: CLR1040DOEN
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
See All Attributes
Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-ring product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-ring

Product ID: CLR1040M18E
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
EPDM
See All Attributes
Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 9.875 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 9.875 inches

Product ID: CLR109875
Unit of Measure
72/EA
Min Order Qty
72
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
See All Attributes
3um, 10", DOE product photo

3um, 10", DOE

Product ID: CLR310
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
See All Attributes
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, silicone, DOE with elastomer gasket seals & end caps product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, silicone, DOE with elastomer gasket seals & end caps

Product ID: CLR510DOES
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
See All Attributes
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, silicone, SOE fin end external 226 O-rings product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, silicone, SOE fin end external 226 O-rings

Product ID: CLR510M7S
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
See All Attributes
10um, 50", DOE product photo

10um, 50", DOE

Product ID: CLR1050
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
50 in
Cartridge Length (Metric)
1270 mm
Cartridge Length (Metric)
127 cm
Gasket / O-Ring Material
NA
See All Attributes
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 19.5 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 19.5 inches

Product ID: CLR20195
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
See All Attributes
Claris, Polypropylene, 30 micron, 19.5 inch product photo

Claris, Polypropylene, 30 micron, 19.5 inch

Product ID: CLR30195
Unit of Measure
24/EA
Min Order Qty
24
49.5 cm / 19.5 in
30 micron
Claris, Polypropylene, 75 micron, 19.5 inch product photo

Claris, Polypropylene, 75 micron, 19.5 inch

Product ID: CLR75195
Unit of Measure
24/EA
Min Order Qty
24
49.5 cm / 19.5 in
75 micron
72 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English