Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Pall Water Shop

5um, 10", 2.5 OD, 316 Stainless Steel, Individually wrapped product photo

5um, 10", 2.5 OD, 316 Stainless Steel, Individually wrapped

Product ID: C005A10S1PK
Unit of Measure
30/EA
Min Order Qty
30
Individually wrapped
See All Attributes
Claris, Polypropylene, 10 micron, 40 inch product photo

10um, 40", DOE

Product ID: CLR1040
Unit of Measure
12/EA
Min Order Qty
12
102 cm / 40 in
10 micron
50um, 40", 2.5 OD, Polypropylene Core, Individually wrapped product photo

50um, 40", 2.5 OD, Polypropylene Core, Individually wrapped

Product ID: U050AW40U1PK
Unit of Measure
10/EA
Min Order Qty
10
Individually wrapped
See All Attributes
5um, 20", DOE product photo

5um, 20", DOE

Product ID: CLR520
Unit of Measure
24/EA
Min Order Qty
24
50.8 cm / 20 in
5 micron
Claris, Polypropylene, 50 micron, 40 inch product photo

50um, 40", DOE

Product ID: CLR5040
Unit of Measure
12/EA
Min Order Qty
12
102 cm / 40 in
50 micron
5 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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