Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Capsules

Supracap™ 50 depth filter capsule with dual-layer media grade PDCX (0.05-0.5 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDCX (0.05-0.5 µm retention rating) and luer-lock connections

Product ID: SC050PDCX
Unit of Measure
1/EA
Min Order Qty
1
0.05-0.5 µm
Regenerated Cellulose
3 L
22 cm²
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Supracap™ 50 depth filter capsule with dual-layer media grade PDBX (0.05-0.5 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDBX (0.05-0.5 µm retention rating) and luer-lock connections

Product ID: SC050PDBX
Unit of Measure
1/EA
Min Order Qty
1
0.05-0.5 µm
Regenerated Cellulose
3 L
22 cm²
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Supracap™ 50 depth filter capsule with dual-layer media grade PDAX (0.05-0.3 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDAX (0.05-0.3 µm retention rating) and luer-lock connections

Product ID: SC050PDAX
Unit of Measure
1/EA
Min Order Qty
1
0.05-0.3 µm
Regenerated Cellulose
3 L
22 cm²
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Supracap™ 50 depth filter capsule with single-layer media grade EKXP (0.05-0.2 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade EKXP (0.05-0.2 µm retention rating) and luer-lock connections

Product ID: SC050PEKX
Unit of Measure
1/EA
Min Order Qty
1
0.05-0.2 µm
Regenerated Cellulose
3 L
22 cm²
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Supracap™ 50 depth filter capsule with dual-layer media grade PDC1 (0.1-0.5 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDC1 (0.1-0.5 µm retention rating) and luer-lock connections

Product ID: SC050PDC1
Unit of Measure
1/EA
Min Order Qty
1
0.1-0.5 µm
Regenerated Cellulose
3 L
22 cm²
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Supracap™ 50 depth filter capsule with dual-layer media grade PDD1 (0.1-0.85 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDD1 (0.1-0.85 µm retention rating) and luer-lock connections

Product ID: SC050PDD1
Unit of Measure
1/EA
Min Order Qty
1
0.1-0.85 µm
Regenerated Cellulose
3 L
22 cm²
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Supracap™ 50 depth filter capsule with dual-layer media grade PDE1 (0.1-3 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDE1 (0.1-3 µm retention rating) and luer-lock connections

Product ID: SC050PDE1
Unit of Measure
1/EA
Min Order Qty
1
0.1-3 µm
Regenerated Cellulose
3 L
22 cm²
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Supracap™ 50 depth filter capsule with single-layer media grade EKSP (0.1-0.3 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade EKSP (0.1-0.3 µm retention rating) and luer-lock connections

Product ID: SC050PEKS
Unit of Measure
1/EA
Min Order Qty
1
0.1-0.3 µm
Regenerated Cellulose
3 L
22 cm²
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Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, 1½ in. sanitary flange inlet and ½ in. hose barb outlet connections, pre-sterilized by gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, 1½ in. sanitary flange inlet and ½ in. hose barb outlet connections, pre-sterilized by gamma irradiation

Product ID: KA2DFLP16S
Unit of Measure
1/EA
Min Order Qty
1
0.2 µm
Polyvinylidene fluoride (PVDF)
Provided Pre-Sterilized by Gamma Irradiation
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Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, ¼-½ in. hose barb connections, suitable for gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, ¼-½ in. hose barb connections, suitable for gamma irradiation

Product ID: KA2DFLP2G
Unit of Measure
1/EA
Min Order Qty
1
0.2 µm
Polyvinylidene fluoride (PVDF)
Suitable for Gamma Irradiation, Suitable for Autoclave
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Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 380 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 380 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Product ID: KA1V002PV1G
Unit of Measure
1/EA
Min Order Qty
1
Polyvinylidene fluoride (PVDF)
380 cm²
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Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 380 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 380 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation

Product ID: KA1V002PV1S
Unit of Measure
1/EA
Min Order Qty
1
Polyvinylidene fluoride (PVDF)
380 cm²
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127 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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