Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Use

Depth Filtration

Supracap™ 50 depth filter capsule with dual-layer media grade PDCX (0.05-0.5 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDCX (0.05-0.5 µm retention rating) and luer-lock connections

Product ID: SC050PDCX
Unit of Measure
1/EA
Min Order Qty
1
0.05-0.5 µm
Regenerated Cellulose
3 L
22 cm²
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Supracap™ 50 depth filter capsule with dual-layer media grade PDAX (0.05-0.3 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDAX (0.05-0.3 µm retention rating) and luer-lock connections

Product ID: SC050PDAX
Unit of Measure
1/EA
Min Order Qty
1
0.05-0.3 µm
Regenerated Cellulose
3 L
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with dual-layer media grade PDBX (0.05-0.5 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDBX (0.05-0.5 µm retention rating) and luer-lock connections

Product ID: SC050PDBX
Unit of Measure
1/EA
Min Order Qty
1
0.05-0.5 µm
Regenerated Cellulose
3 L
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with single-layer media grade EKXP (0.05-0.2 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade EKXP (0.05-0.2 µm retention rating) and luer-lock connections

Product ID: SC050PEKX
Unit of Measure
1/EA
Min Order Qty
1
0.05-0.2 µm
Regenerated Cellulose
3 L
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with dual-layer media grade PDD1 (0.1-0.85 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDD1 (0.1-0.85 µm retention rating) and luer-lock connections

Product ID: SC050PDD1
Unit of Measure
1/EA
Min Order Qty
1
0.1-0.85 µm
Regenerated Cellulose
3 L
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with dual-layer media grade PDC1 (0.1-0.5 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDC1 (0.1-0.5 µm retention rating) and luer-lock connections

Product ID: SC050PDC1
Unit of Measure
1/EA
Min Order Qty
1
0.1-0.5 µm
Regenerated Cellulose
3 L
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with dual-layer media grade PDE1 (0.1-3 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDE1 (0.1-3 µm retention rating) and luer-lock connections

Product ID: SC050PDE1
Unit of Measure
1/EA
Min Order Qty
1
0.1-3 µm
Regenerated Cellulose
3 L
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with single-layer media grade EKSP (0.1-0.3 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade EKSP (0.1-0.3 µm retention rating) and luer-lock connections

Product ID: SC050PEKS
Unit of Measure
1/EA
Min Order Qty
1
0.1-0.3 µm
Regenerated Cellulose
3 L
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with single-layer media grade BIO 10 (0.2-0.4 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade BIO 10 (0.2-0.4 µm retention rating) and luer-lock connections

Product ID: SC050B010
Unit of Measure
1/EA
Min Order Qty
1
0.2-0.4 µm
Cellulose
3 L
22 cm²
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Supracap™ 50 depth filter capsule with dual-layer media grade PDE2 (0.2-3.5 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDE2 (0.2-3.5 µm retention rating) and luer-lock connections

Product ID: SC050PDE2
Unit of Measure
1/EA
Min Order Qty
1
0.2-3.5 µm
Regenerated Cellulose
3 L
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with dual-layer media grade PDD2 (0.2-0.8 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDD2 (0.2-0.8 µm retention rating) and luer-lock connections

Product ID: SC050PDD2
Unit of Measure
1/EA
Min Order Qty
1
0.2-0.8 µm
Regenerated Cellulose
3 L
22 cm²
See All Attributes
Supracap™ 50 depth filter capsule with single-layer media grade SUPRA EK1P (0.2-0.5 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade SUPRA EK1P (0.2-0.5 µm retention rating) and luer-lock connections

Product ID: SC050PEK1
Unit of Measure
1/EA
Min Order Qty
1
0.2-0.5 µm
Regenerated Cellulose
3 L
22 cm²
See All Attributes
37 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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