Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Lube and Hydraulic Oil Filtration

Ultipor, 1200psi Duplex Hsg, 1.25in Flange Ports, 16in Length, Fluorocarbon Seals product photo

Ultipor, 1200psi Duplex Hsg, 1.25in Flange Ports, 16in Length, Fluorocarbon Seals

Product ID: HZ8670D20UB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (300 #)
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
1200 psi
Port Size
1.25 in
Number of Cartridges
1 per side
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Athalon, 6000psi Simplex Hsg, 1.25in BSP Ports, 20in Length, Fluorocarbon Seals product photo

Athalon, 6000psi Simplex Hsg, 1.25in BSP Ports, 20in Length, Fluorocarbon Seals

Product ID: UH310C2020ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.5in SAE Ports, 13in Length, Fluorocarbon Seals product photo

Athalon, 6000psi Simplex Hsg, 1.5in SAE Ports, 13in Length, Fluorocarbon Seals

Product ID: UH310A2413ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 600psi Simplex Hsg, 1.5in SAE Ports, 8in Length, Fluorocarbon Seals product photo

Athalon, 600psi Simplex Hsg, 1.5in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UR310A2408ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1.5 in
Number of Cartridges
1
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Supralon GlassFiber 5 micron (Beta 2000) Fluorocarbon 4in 10.16 cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 4 Inches

Product ID: HC6200FRP4Z
Unit of Measure
12/EA
Min Order Qty
12
Element Series
HC6200
Filter Removal Rating
5 micron (Beta 2000)
Nominal Length (Imperial)
4 in
Seal Material
Fluorocarbon
Supralon GlassFiber 12 micron (Beta 2000) Fluorocarbon 4in 10.16 cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 4 Inches

Product ID: HC6200FRS4Z
Unit of Measure
12/EA
Min Order Qty
12
Element Series
HC6200
Filter Removal Rating
12 micron (Beta 2000)
Nominal Length (Imperial)
4 in
Seal Material
Fluorocarbon
Supralon GlassFiber 7 micron (Beta 2000) Fluorocarbon 4in 10.16 cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 4 Inches

Product ID: HC6200FRN4Z
Unit of Measure
12/EA
Min Order Qty
12
Element Series
HC6200
Filter Removal Rating
7 micron (Beta 2000)
Nominal Length (Imperial)
4 in
Seal Material
Fluorocarbon
Supralon GlassFiber 25 micron (Beta 2000) Fluorocarbon 4in 10.16 cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 25 μm, GlassFiber, Length 4 Inches

Product ID: HC6200FRT4Z
Unit of Measure
12/EA
Min Order Qty
12
Element Series
HC6200
Filter Removal Rating
25 micron (Beta 2000)
Nominal Length (Imperial)
4 in
Seal Material
Fluorocarbon
Supralon GlassFiber 25 micron (Beta 2000) 4in 10.16 cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 25 μm, GlassFiber, Length 4 Inches

Product ID: HC7400FRT4
Unit of Measure
10/EA
Min Order Qty
10
Element Series
HC7400
Filter Removal Rating
25 micron (Beta 2000)
Nominal Length (Imperial)
4 in
Supralon GlassFiber 12 micron (Beta 2000) Nitrile 4in 10.16 cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 4 Inches

Product ID: HC7400SRS4HSW
Unit of Measure
12/EA
Min Order Qty
12
Element Series
HC7400
Filter Removal Rating
12 micron (Beta 2000)
Nominal Length (Imperial)
4 in
Seal Material
Nitrile
Supralon GlassFiber 12 micron (Beta 2000) Fluorocarbon 4in 10.16 cm product photoFEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 4 Inches

Product ID: HC7400SRS4Z
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
12 µm
Membrane Material
Glass Fiber
Nominal Length (Imperial)
4 in
Supralon GlassFiber 7 micron (Beta 2000) Nitrile 4in 10.16 cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 4 Inches

Product ID: HC7400SRN4HYR61
Unit of Measure
1/EA
Min Order Qty
1
Element Series
HC7400
Filter Removal Rating
7 micron (Beta 2000)
Nominal Length (Imperial)
4 in
Seal Material
Nitrile
1,792 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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