Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Grade

1 µm

Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 1 cartridge, No flange product photo

Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 1 cartridge, No flange

Product ID: PEV11UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Marksman™, Large Format Filters, Filter Grade 1 µm, polypropylene, Size 2 bag, EPDM, Plastic self-adjusting flange product photo

Marksman™, Large Format Filters, Filter Grade 1 µm, polypropylene, Size 2 bag, EPDM, Plastic self-adjusting flange

Product ID: PFTM12UEPFB
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™ High Flow, Large Format Filters, Filter Grade 1 µm, polypropylene, Length 20 Inches product photo

Marksman™ High Flow, Large Format Filters, Filter Grade 1 µm, polypropylene, Length 20 Inches

Product ID: PFTM120UHFH1
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Marksman™, Large Format Filters, Filter Grade 1 µm, polypropylene, Size 2 bag, EPDM, Plastic self-adjusting flange, FSI FSPN Series vessels Hayward7 over the top product photo

Marksman™, Large Format Filters, Filter Grade 1 µm, polypropylene, Size 2 bag, EPDM, Plastic self-adjusting flange, FSI FSPN Series vessels Hayward7 over the top

Product ID: PFTM12UEPFC
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes
Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 40 inches, Silicone product photo

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 40 inches, Silicone

Product ID: RPF009UY640S0010S
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
40/1016 inch/mm
Filter Grade
1 µm
Cartridge Length (Metric)
1016 mm
Cartridge Length (Imperial)
40 in
Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 40 inches, EPDM product photo

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 40 inches, EPDM

Product ID: RPF009UY640S0010E
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
1 µm
Cartridge Length (Metric)
1016 mm
Cartridge Length (Imperial)
40 in
Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 40 inches product photo

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 40 inches

Product ID: RPF009UY640S0010N
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
1 µm
Cartridge Length (Metric)
1016 mm
Cartridge Length (Imperial)
40 in
Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 40 inches, Fluorocarbon product photo

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 40 inches, Fluorocarbon

Product ID: RPF009UY640S0010V
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
1 µm
Cartridge Length (Metric)
1016 mm
Cartridge Length (Imperial)
40 in
Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 60 inches, Fluorocarbon product photo

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 60 inches, Fluorocarbon

Product ID: RPF009UY660S0010V
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Cartridge Length (Metric)
1524 mm
Cartridge Length (Imperial)
60 in
Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 60 inches, Nitrile product photo

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 60 inches, Nitrile

Product ID: RPF009UY660S0010N
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Cartridge Length (Metric)
1524 mm
Cartridge Length (Imperial)
60 in
Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 60 inches product photo

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 60 inches

Product ID: RPF009UY660S0010S
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Cartridge Length (Metric)
1524 mm
Cartridge Length (Imperial)
60 in
Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 60 inches, EPDM product photo

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 60 inches, EPDM

Product ID: RPF009UY660S0010E
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Cartridge Length (Metric)
1524 mm
Cartridge Length (Imperial)
60 in
23 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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