Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Nominal Length (Metric)

7.62 cm

Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 3in 7.62cm length (REPLACED BY HC0030FRS3Z) product photo

Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 3in 7.62cm length (REPLACED BY HC0030FRS3Z)

Product ID: HC0030FDS3H
Unit of Measure
1/EA
Min Order Qty
1
Element Series
HC0030
Nominal Length (Imperial)
3 in
Seal Material
Nitrile
Ultipor III Glass Fiber 7 micron (Beta 1000) Nitrile 3in 7.62cm length (REPLACED BY HC0030FRN3Z) product photo

Ultipor III Glass Fiber 7 micron (Beta 1000) Nitrile 3in 7.62cm length (REPLACED BY HC0030FRN3Z)

Product ID: HC0030FDN3H
Unit of Measure
1/EA
Min Order Qty
1
Element Series
HC0030
Nominal Length (Imperial)
3 in
Seal Material
Nitrile
Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 3in 7.62cm length (REPLACED BY HC0030FRP3Z) product photo

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 3in 7.62cm length (REPLACED BY HC0030FRP3Z)

Product ID: HC0030FDP3H
Unit of Measure
1/EA
Min Order Qty
1
Element Series
HC0030
Nominal Length (Imperial)
3 in
Seal Material
Nitrile
Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 3in 7.62cm (REPLACED BY HC0896FHN3Z) product photo

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 3in 7.62cm (REPLACED BY HC0896FHN3Z)

Product ID: HC0896FDN3H
Unit of Measure
1/EA
Min Order Qty
6
Element Series
HC0896
Filter Removal Rating
7 micron (Beta 1000)
Nominal Length (Imperial)
3 in
Seal Material
Nitrile
Red1000 Glass Fiber 25 micron (Beta 1000) Nitrile 3in 7.62cm length (REPLACED BY HC0896FHT3Z) product photo

Red1000 Glass Fiber 25 micron (Beta 1000) Nitrile 3in 7.62cm length (REPLACED BY HC0896FHT3Z)

Product ID: HC0896FDT3H
Unit of Measure
1/EA
Min Order Qty
6
Element Series
HC0896
Nominal Length (Imperial)
3 in
Seal Material
Nitrile
Red1000 Glass Fiber 12 micron (Beta 1000) Fluorocarbon 3in 7.62cm product photo

HC2206FCS3Z ELEMENT

Product ID: HC2206FCS3Z
Unit of Measure
1/EA
Min Order Qty
1
Element Series
HC2206
Filter Removal Rating
12 micron, Beta 1000
Nominal Length (Imperial)
3 in
OEM 1
EPE
OEM 2
Hydac
OEM 3
Hypro
See All Attributes
Red1000 Glass Fiber 7 micron (Beta 1000) Fluorocarbon 3in 7.62cm (REPLACED BY HC2206FRN3Z) product photo

Red1000 Glass Fiber 7 micron (Beta 1000) Fluorocarbon 3in 7.62cm (REPLACED BY HC2206FRN3Z)

Product ID: HC2206FKN3Z
Unit of Measure
1/EA
Min Order Qty
1
Element Series
HC2206
Filter Removal Rating
7 micron (Beta 1000)
Nominal Length (Imperial)
3 in
Seal Material
Fluorocarbon
Supralon GlassFiber 12 micron (Beta 2000) Fluorocarbon 3in 7.62cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 3 inches

Product ID: HC0030FRS3Z
Unit of Measure
12/EA
Min Order Qty
12
Element Series
HC0030
Filter Removal Rating
12 micron (Beta 2000)
Nominal Length (Imperial)
3 in
Seal Material
Fluorocarbon
Supralon GlassFiber 12 micron (Beta 2000) Fluorocarbon 3in 7.62cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 3 inches

Product ID: HC0465FRS3Z
Unit of Measure
12/EA
Min Order Qty
12
Element Series
HC0465
Filter Removal Rating
12 micron (Beta 2000)
Nominal Length (Imperial)
3 in
Seal Material
Fluorocarbon
Supralon GlassFiber 12 micron (Beta 2000) Fluorocarbon 3in 7.62cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 3 inches

Product ID: HC0896FHS3Z
Unit of Measure
6/EA
Min Order Qty
6
Element Series
HC0896
Filter Removal Rating
12 micron (Beta 2000)
Nominal Length (Imperial)
3 in
Seal Material
Fluorocarbon
Supralon GlassFiber 12 micron (Beta 2000) Fluorocarbon 3in 7.62cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 3 Inches

Product ID: HC2206FRS3Z
Unit of Measure
12/EA
Min Order Qty
12
Element Series
HC2206
Filter Removal Rating
12 micron (Beta 2000)
Nominal Length (Imperial)
3 in
Seal Material
Fluorocarbon
Supralon GlassFiber 12 micron (Beta 2000) Fluorocarbon 3in 7.62cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 3 Inches

Product ID: HC2207FHS3Z
Unit of Measure
12/EA
Min Order Qty
12
Element Series
HC2207
Filter Removal Rating
12 micron (Beta 2000)
Nominal Length (Imperial)
3 in
Seal Material
Fluorocarbon
37 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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