Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, 1½ in. sanitary flange inlet and ½ in. hose barb outlet connections, pre-sterilized by gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, 1½ in. sanitary flange inlet and ½ in. hose barb outlet connections, pre-sterilized by gamma irradiation

Product ID: KA2DFLP16S
Unit of Measure
1/EA
Min Order Qty
1
0.2 µm
Polyvinylidene fluoride (PVDF)
Provided Pre-Sterilized by Gamma Irradiation
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Emflon® PFRW Filter Cartridge, 0.2µm, 5 in, Single open ended Code 2, Silicone Elastomer O-ring product photoFEATURED

Emflon® PFRW Filter Cartridge, 0.2µm, 5 in, Single open ended Code 2, Silicone Elastomer O-ring

Product ID: AB05PFR2WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
4000 cm²
Filter Cartridge Style
Code 2
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
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Emflon® PFRW Junior Style Filter Cartridge, 0.2µm, 5.3 in, Internal Plug seal with single 116 Silicone Elastomer O-ring product photoFEATURED

Emflon® PFRW Junior Style Filter Cartridge, 0.2µm, 5.3 in, Internal Plug seal with single 116 Silicone Elastomer O-ring

Product ID: MCY4463PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
2800 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
5.3 in
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Profile® II Filter Cartridges, 0.5 µm, 40 in, Single Open Ended Code 7, Silicone Elastomer O-ring product photo

Profile® II Filter Cartridges, 0.5 µm, 40 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB4Y0057WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Maximum Differential Pressure
4 bard @ < 30° C (86◦ F)
Cage, Core, Fin End and Endcap
Polypropylene
Food Contact Compliant
Yes
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NXA 0.5-30U-M3S product photo

Nexis, NXA, 0.5 μm, 76.2 cm (30 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), Silicone gasket

Product ID: NXA0530UM3S
Unit of Measure
12/EA
Min Order Qty
12
0.5 micron
0.5um, 20", DOE product photo

0.5um, 20", DOE

Product ID: NXA0520U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
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CTRG AB3 PROFILE C7 005H4 W product photo

CTRG AB3 PROFILE C7 005H4 W

Product ID: AB3Y0057WH4
Unit of Measure
1/EA
Min Order Qty
1
SUPRAdisc SD II 080 200X080C232SPW product photo

SUPRAdisc SD II 080 200X080C232SPW

Product ID: 7007865
Unit of Measure
1/EA
Min Order Qty
1
1. Recommended Max. Backpressure During Backwash
0.5 bar
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
Diameter (Imperial)
12 in
Diameter (Metric)
287 mm
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SUPRAdisc SD II EK 1 200XEK1C232SPW product photo

SUPRAdisc SD II EK 1 200XEK1C232SPW

Product ID: 7007871
Unit of Measure
1/EA
Min Order Qty
1
1. Recommended Max. Backpressure During Backwash
0.5 bar
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
Diameter (Imperial)
12 in
Diameter (Metric)
287 mm
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SUPRAdisc 1 Lenticular, 12", Flat Gasket, Silicone Seal, Seitz AKS 4 media, 1,7 m² Filter Area product photo

SUPRAdisc 1 Lenticular, 12", Flat Gasket, Silicone Seal, Seitz AKS 4 media, 1,7 m² Filter Area

Product ID: 7007996
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
Plastic Material
Polypropylene
Core Drainage Discs
Polypropylene
Diameter (Imperial)
12 in
Diameter (Metric)
285 mm
Filter Media
Activated carbon Kieselguhr and CelluloseF ibers
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Claris, Polypropylene, 1 micron, 9.75 inch product photo

Claris, Polypropylene, 1 micron, 9.75 inch

Product ID: CLR1975
Unit of Measure
36/EA
Min Order Qty
36
24.8 cm / 9.75 in
1 micron
Vector, polypropylene Media Material with 1 µm (micron) Filter Grade product photo

Vector, polypropylene Media Material with 1 µm (micron) Filter Grade

Product ID: HFV660PP001PH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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