Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, 1½ in. sanitary flange inlet and ½ in. hose barb outlet connections, pre-sterilized by gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, 1½ in. sanitary flange inlet and ½ in. hose barb outlet connections, pre-sterilized by gamma irradiation

Product ID: KA2DFLP16S
Unit of Measure
1/EA
Min Order Qty
1
0.2 µm
Polyvinylidene fluoride (PVDF)
Provided Pre-Sterilized by Gamma Irradiation
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Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, ¼-½ in. hose barb connections, suitable for gamma irradiation product photo

Fluorodyne® II DFL membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 800 cm² EFA, ¼-½ in. hose barb connections, suitable for gamma irradiation

Product ID: KA2DFLP2G
Unit of Measure
1/EA
Min Order Qty
1
0.2 µm
Polyvinylidene fluoride (PVDF)
Suitable for Gamma Irradiation, Suitable for Autoclave
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Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 380 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 380 cm² EFA, 1-1½ in. sanitary flange connections, pre-sterilized by gamma irradiation

Product ID: KA1V002PV1S
Unit of Measure
1/EA
Min Order Qty
1
Polyvinylidene fluoride (PVDF)
380 cm²
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Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, ¼-½ in. hose barb connections, pre-sterilized by gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, ¼-½ in. hose barb connections, pre-sterilized by gamma irradiation

Product ID: KA2V002PV2S
Unit of Measure
1/EA
Min Order Qty
1
Polyvinylidene fluoride (PVDF)
820 cm²
See All Attributes
Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, ¼-½ in. hose barb connections, suitable for gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, ¼-½ in. hose barb connections, suitable for gamma irradiation

Product ID: KA2V002PV2G
Unit of Measure
1/EA
Min Order Qty
1
Polyvinylidene fluoride (PVDF)
820 cm²
See All Attributes
Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 820 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Product ID: KA2V002PV1G
Unit of Measure
1/EA
Min Order Qty
1
Polyvinylidene fluoride (PVDF)
820 cm²
See All Attributes
Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 1700 cm² EFA, ½ in. hose barb connections, suitable for gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 1700 cm² EFA, ½ in. hose barb connections, suitable for gamma irradiation

Product ID: KA3V002PV6G
Unit of Measure
1/EA
Min Order Qty
1
Polyvinylidene fluoride (PVDF)
1700 cm²
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Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 1700 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 1700 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Product ID: KA3V002PV1G
Unit of Measure
1/EA
Min Order Qty
1
Polyvinylidene fluoride (PVDF)
1700 cm²
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Emflon® PFRW Junior Style Filter Cartridge, 0.2µm, 5.3 in, Internal Plug seal with single 116 Silicone Elastomer O-ring product photoFEATURED

Emflon® PFRW Junior Style Filter Cartridge, 0.2µm, 5.3 in, Internal Plug seal with single 116 Silicone Elastomer O-ring

Product ID: MCY4463PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
2800 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
5.3 in
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Emflon® PFRW Filter Cartridge, 0.2µm, 5 in, Single open ended Code 2, Silicone Elastomer O-ring product photoFEATURED

Emflon® PFRW Filter Cartridge, 0.2µm, 5 in, Single open ended Code 2, Silicone Elastomer O-ring

Product ID: AB05PFR2WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
4000 cm²
Filter Cartridge Style
Code 2
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
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NXA 0.5-30U-M3S product photo

Nexis, NXA, 0.5 μm, 76.2 cm (30 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), Silicone gasket

Product ID: NXA0530UM3S
Unit of Measure
12/EA
Min Order Qty
12
0.5 micron
Profile® II Filter Cartridges, 0.5 µm, 40 in, Single Open Ended Code 7, Silicone Elastomer O-ring product photo

Profile® II Filter Cartridges, 0.5 µm, 40 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB4Y0057WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Maximum Differential Pressure
4 bard @ < 30° C (86◦ F)
Cage, Core, Fin End and Endcap
Polypropylene
Food Contact Compliant
Yes
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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