Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Beta Rating

BETA 1000

Nominal OD (Imperial)

2.1 in

Ultipor SRT Anti-Static Glass Fiber 7 micron (Beta 1000) Nitrile 4in 10.16cm length (REPLACED BY HC9804FRN4Z) product photo

Ultipor SRT Anti-Static Glass Fiber 7 micron (Beta 1000) Nitrile 4in 10.16cm length (REPLACED BY HC9804FRN4Z)

Product ID: HC9804FAN4H
Unit of Measure
1/EA
Min Order Qty
1
Element Series
HC9804
Filter Removal Rating
7 micron (Beta 1000)
Nominal Length (Imperial)
4 in
Seal Material
Nitrile
Versalon Glass Fiber 12 micron (Beta 1000) Fluorocarbon 4in 10.16cm product photo

HCG200FCS4Z ELEMENT BRANDED

Product ID: 51657348
Unit of Measure
1/EA
Min Order Qty
1
Element Series
HCG200
Nominal Length (Imperial)
4 in
Seal Material
Fluorocarbon
Ultipor III Glass Fiber 25 micron (Beta 1000) Fluorocarbon 4in 10.16cm product photo

Ultipor III Glass Fiber 25 micron (Beta 1000) Fluorocarbon 4in 10.16cm

Product ID: HC9800FTT4ZY923
Unit of Measure
12/EA
Min Order Qty
12
Element Series
HC9800
Nominal Length (Imperial)
4 in
Seal Material
Fluorocarbon
Ultipor III Glass Fiber 5 micron (Beta 1000) Ethylene Propylene 4in 10.16cm (REPLACED BY HC9801FHP4JY806) product photo

Ultipor III Glass Fiber 5 micron (Beta 1000) Ethylene Propylene 4in 10.16cm (REPLACED BY HC9801FHP4JY806)

Product ID: HC9801FDP4JY806
Unit of Measure
1/EA
Min Order Qty
1
Element Series
HC9801
Nominal Length (Imperial)
4 in
Seal Material
Ethylene Propylene

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 7 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC9800FRN8Z) product photo

Ultipor III Glass Fiber 7 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC9800FRN8Z)

Product ID: HC9800FKN8H
Unit of Measure
1/EA
Min Order Qty
1
Element Series
HC9800
Nominal Length (Imperial)
8 in
Seal Material
Nitrile

This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 12 micron (Beta 1000) 8in 20.32cm product photo

ELEMENT 9804FMS6 SPECIAL

Product ID: 7342035
Unit of Measure
1/EA
Min Order Qty
1
Element Series
HC9804
Nominal Length (Imperial)
8 in
Seal Material
-
Ultipor SRT Glass Fiber 12 micron (Beta 1000) Nitrile 8in 20.32cm product photo

HC9804FAN8H ELEMENT 1283169

Product ID: 1283169
Unit of Measure
1/EA
Min Order Qty
1
Element Series
HC9804
Nominal Length (Imperial)
8 in
Seal Material
Nitrile
Ultipor III Glass Fiber 5 micron (Beta 1000) Ethylene Propylene 8in 20.32cm (REPLACED BY HC9801FHP8JY806) product photo

Ultipor III Glass Fiber 5 micron (Beta 1000) Ethylene Propylene 8in 20.32cm (REPLACED BY HC9801FHP8JY806)

Product ID: HC9801FDP8JY806
Unit of Measure
1/EA
Min Order Qty
1
Element Series
HC9801
Nominal Length (Imperial)
8 in
Seal Material
Ethylene Propylene

This product is currently not available. Please contact us for more information.

8 Items
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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