Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Cartridge Style

Code 7

Emflon® PFRW Filter Cartridge, 0.2µm, 10 in, Single open ended Code 7, Silicone Elastomer O-ring product photoFEATURED

Emflon® PFRW Filter Cartridge, 0.2µm, 10 in, Single open ended Code 7, Silicone Elastomer O-ring

Product ID: AB1PFR7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
8000 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Ultipor® N66 Filter Cartridges, Nylon Hardware, 0.45 µm single layer, 30 in, Single Open Ended Code 7, Silicone Elastomer O-ring product photo

Ultipor® N66 Filter Cartridges, Nylon Hardware, 0.45 µm single layer, 30 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: ABN3NB7BH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Nylon with integral polyester non-woven filtrate
Filter Cartridge Style
Code 7
Maximum Differential Pressure
5.4 bard @ < 50° C (122◦ F)
Cage, Core
Polypropylene
End Cap and Fin End
Unpigmented Nylon 6-10
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Profile® II Filter Cartridges, 0.5 µm, 40 in, Single Open Ended Code 7, Silicone Elastomer O-ring product photo

Profile® II Filter Cartridges, 0.5 µm, 40 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB4Y0057WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Maximum Differential Pressure
4 bard @ < 30° C (86◦ F)
Cage, Core, Fin End and Endcap
Polypropylene
Food Contact Compliant
Yes
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Profile® Star Filter Cartridges, Removal Rating 1.5 μm, Polypropylene, Length 20 inches, silicone product photo

Profile® Star Filter Cartridges, Removal Rating 1.5 μm, Polypropylene, Length 20 inches, silicone

Product ID: AB2A0157H4
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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Profile® Star Filter Cartridges, Removal Rating 1.5 μm, Polypropylene, Length 20 inches, Ethylene Propylene product photo

Profile® Star Filter Cartridges, Removal Rating 1.5 μm, Polypropylene, Length 20 inches, Ethylene Propylene

Product ID: AB2A0157J
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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Profile Star Filter Cartridge, 1.5µm, 30 in, Single Open Ended Code 7, Silicone Elastomer O-ring product photo

Profile Star Filter Cartridge, 1.5µm, 30 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB3A0157WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Fuente II Filter Cartridge, 10 in,single open end code 7, Silicone Elastomer O-ring product photo

Fuente II Filter Cartridge, 10 in,single open end code 7, Silicone Elastomer O-ring

Product ID: AB1FFN7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PES, with built in pre-filtration
Effective Filtration Area (Metric m²)
1.04 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Profile® Star Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, silicone product photo

Profile® Star Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, silicone

Product ID: AB2A1007H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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Profile® Star Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, Ethylene Propylene product photo

Profile® Star Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, Ethylene Propylene

Product ID: AB2A1007J
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
See All Attributes
Profile Star Filter Cartridge, 10 µm, 30 in, Single Open Ended Code 7, Silicone Elastomer O-ring product photo

Profile Star Filter Cartridge, 10 µm, 30 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB3A1007WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Industry-Specific Certification
W480 Food Contact
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
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Filter 20" Ultipor GF+ 1µm product photo

Ultipor® GF Plus Filter Cartridges, Removal Rating 1 μm, Length 20 inches

Product ID: AB2U010Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Profile Star Filter Cartridge, 1µm, 30 in, Single Open Ended Code 7, Silicone Elastomer O-ring product photo

Profile Star Filter Cartridge, 1µm, 30 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB3A0107WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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30 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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