Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Gasket / O-Ring Material

Fluorocarbon Elastomer

Duo-Fine® , Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, Fluorocarbon Elastomer product photo

Duo-Fine® , Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, Fluorocarbon Elastomer

Product ID: DFN0230AV
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 20 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 20 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings

Product ID: PFT0220UVM7
Unit of Measure
1/EA
Min Order Qty
1
0.2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 20 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 20 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: PFT0220UVM3
Unit of Measure
1/EA
Min Order Qty
1
0.2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Polypropylene, Length 20 Inches product photo

PolyFine-II Filter Cartridge, Polyproylene, 0.2 µm, 20 in, Fluorocarbon elastomer, M3

Product ID: PFT02HA20UVM3B623
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings

Product ID: PFT02510UVM7
Unit of Measure
1/EA
Min Order Qty
1
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: PFT02530UVM3
Unit of Measure
1/EA
Min Order Qty
1
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings

Product ID: PFT02530UVM7
Unit of Measure
1/EA
Min Order Qty
1
0.25 µm
Duo-Fine® , Filter Cartridges, Removal Rating 0.45 μm, Length 10 Inches, Fluorocarbon Elastomer, Blank - DOE with elastomer gasket seals & end caps product photo

Duo-Fine® , Filter Cartridges, Removal Rating 0.45 μm, Length 10 Inches, Fluorocarbon Elastomer, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN04510AV
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes
Duo-Fine® , Filter Cartridges, Removal Rating 0.45 μm, Length 20 Inches, Fluorocarbon Elastomer product photo

Duo-Fine® , Filter Cartridges, Removal Rating 0.45 μm, Length 20 Inches, Fluorocarbon Elastomer

Product ID: DFN04520AV
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: PFT04510UVM8
Unit of Measure
1/EA
Min Order Qty
1
0.45 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings

Product ID: PFT04530UVM7
Unit of Measure
1/EA
Min Order Qty
1
0.45 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer, DOE industrial

Product ID: PFT0810UV
Unit of Measure
1/EA
Min Order Qty
1
0.8 µm
51 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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