Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Nominal Length (Imperial)

10 in

Emflon® PFRW Filter Cartridge, 0.2µm, 10 in, Single open ended Code 7, Silicone Elastomer O-ring product photoFEATURED

Emflon® PFRW Filter Cartridge, 0.2µm, 10 in, Single open ended Code 7, Silicone Elastomer O-ring

Product ID: AB1PFR7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
8000 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
See All Attributes
Fuente II Filter Cartridge, 10 in,single open end code 7, Silicone Elastomer O-ring product photo

Fuente II Filter Cartridge, 10 in,single open end code 7, Silicone Elastomer O-ring

Product ID: AB1FFN7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PES, with built in pre-filtration
Effective Filtration Area (Metric m²)
1.04 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
See All Attributes
Claris Filter Cartridge, 10 µm, 10 in, Double Open Ended with no endcaps product photo

Claris Filter Cartridge, 10 µm, 10 in, Double Open Ended with no endcaps

Product ID: CLR1010W480
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket O-Ring Code
Blank
See All Attributes
Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 10in 25.4cm product photo

Element Coralon HC2236FCS10

Product ID: HC2236FCS10
Unit of Measure
1/EA
Min Order Qty
1
Element Series
HC2236
Filter Removal Rating
12 micron, Beta 1000
Nominal Length (Imperial)
10 in
OEM 1
EPE
OEM 2
Hydac
OEM 3
Hypro
See All Attributes
Red1000 Glass Fiber 22 micron (Beta 1000) Nitrile 10in 25.4cm (REPLACED BY HC4901FHT10Z) product photo

Red1000 Glass Fiber 22 micron (Beta 1000) Nitrile 10in 25.4cm (REPLACED BY HC4901FHT10Z)

Product ID: HC4901FCT10H
Unit of Measure
1/EA
Min Order Qty
1
Element Series
HC4901
Filter Removal Rating
22 micron, Beta 1000
Nominal Length (Imperial)
10 in
Seal Material
Nitrile
Supralon GlassFiber 19 micron (Beta 2000) Nitrile 10in 25.4 cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 19 μm, GlassFiber, Length 10 Inches

Product ID: 2.4419.800.0
Unit of Measure
1/EA
Min Order Qty
1
Filter Removal Rating
19 micron (Beta 2000)
Nominal Length (Imperial)
10 in
Seal Material
Nitrile
Supralon GlassFiber 5 micron (Beta 2000) Nitrile 10in 25.4cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 10 inches

Product ID: HA522602
Unit of Measure
6/EA
Min Order Qty
6
Element Series
HA522
Filter Removal Rating
5 micron (Beta 2000)
Nominal Length (Imperial)
10 in
Seal Material
Nitrile
Supralon GlassFiber 7 micron (Beta 2000) Fluorocarbon 10in 25.4cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 10 Inches

Product ID: HC2233FRN10Z
Unit of Measure
12/EA
Min Order Qty
12
Element Series
HC2233
Filter Removal Rating
7 micron (Beta 2000)
Nominal Length (Imperial)
10 in
Seal Material
Fluorocarbon
Supralon GlassFiber 7 micron (Beta 2000) Nitrile 10in 25.4cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 10 Inches

Product ID: HC2233FRN10HCN
Unit of Measure
12/EA
Min Order Qty
12
Element Series
HC2233
Filter Removal Rating
7 micron (Beta 2000)
Nominal Length (Imperial)
10 in
Seal Material
Nitrile
Supralon GlassFiber 5 micron (Beta 2000) Fluorocarbon 10in 25.4cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 10 Inches

Product ID: HC2233FRP10Z
Unit of Measure
12/EA
Min Order Qty
12
Element Series
HC2233
Filter Removal Rating
5 micron (Beta 2000)
Nominal Length (Imperial)
10 in
Seal Material
Fluorocarbon
Supralon GlassFiber 12 micron (Beta 2000) Fluorocarbon 10in 25.4cm product photoFEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 10 Inches

Product ID: HC2233FRS10Z
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
12 µm
Membrane Material
Glass Fiber
Nominal Length (Imperial)
10 in
Supralon GlassFiber 25 micron (Beta 2000) Fluorocarbon 10in 25.4cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 25 μm, GlassFiber, Length 10 Inches

Product ID: HC2233FRT10Z
Unit of Measure
12/EA
Min Order Qty
12
Element Series
HC2233
Filter Removal Rating
25 micron (Beta 2000)
Nominal Length (Imperial)
10 in
Seal Material
Fluorocarbon
60 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English