Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Removal Rating

40 µm

Athalon 40 micron Fluorocarbon 40in 101.6cm product photo

Athalon 40 micron Fluorocarbon 40in 101.6cm

Product ID: UE310KR40Z
Unit of Measure
1/EA
Min Order Qty
1
Element Series
UE310
Nominal Length (Imperial)
40 in
Seal Material
Fluorocarbon
Athalon 40 micron Fluorocarbon 40in 101.6cm product photo

Athalon 40 micron Fluorocarbon 40in 101.6cm

Product ID: UE610KR40Z
Unit of Measure
1/EA
Min Order Qty
1
Element Series
UE610
Nominal Length (Imperial)
40 in
Seal Material
Fluorocarbon
Supralon GlassFiber 40 micron Fluorocarbon 13in 33.02cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 40 μm, GlassFiber, Length 13 inches

Product ID: HC9600FRR13Z
Unit of Measure
6/EA
Min Order Qty
6
Element Series
HC9600
Filter Removal Rating
40 micron
Nominal Length (Imperial)
13 in
Seal Material
Fluorocarbon
Supralon GlassFiber 40 micron Fluorocarbon 13in 33.02cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 40 μm, GlassFiber, Length 13 inches

Product ID: HC9604FRR13Z
Unit of Measure
6/EA
Min Order Qty
6
Element Series
HC9604
Filter Removal Rating
40 micron
Nominal Length (Imperial)
13 in
Seal Material
Fluorocarbon
Supralon GlassFiber 40 micron 6in 15.24cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 40 μm, GlassFiber, Length 6 Inches

Product ID: HC2235FRR6
Unit of Measure
6/EA
Min Order Qty
6
Element Series
HC2235
Filter Removal Rating
40 micron
Nominal Length (Imperial)
6 in
Supralon GlassFiber 40 micron Fluorocarbon 16in 40.64 cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 40 μm, GlassFiber, Length 16 Inches

Product ID: HC8304FRR16Z
Unit of Measure
6/EA
Min Order Qty
6
Element Series
HC8304
Filter Removal Rating
40 micron
Nominal Length (Imperial)
16 in
Seal Material
Fluorocarbon
Supralon GlassFiber 40 micron Fluorocarbon 16in 40.64 cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 40 μm, GlassFiber, Length 16 Inches

Product ID: HC8314FRR16Z
Unit of Measure
6/EA
Min Order Qty
6
Element Series
HC8314
Filter Removal Rating
40 micron
Nominal Length (Imperial)
16 in
Seal Material
Fluorocarbon
Supralon GlassFiber 40 micron Fluorocarbon 16in 40.64 cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 40 μm, GlassFiber, Length 16 Inches

Product ID: HC8900FRR16Z
Unit of Measure
3/EA
Min Order Qty
3
Element Series
HC8900
Filter Removal Rating
40 micron
Nominal Length (Imperial)
16 in
Seal Material
Fluorocarbon
Ultipor III 40 micron Nitrile 16in 40.64cm (REPLACED BY HC9600FRR16Z) product photo

Ultipor III 40 micron Nitrile 16in 40.64cm (REPLACED BY HC9600FRR16Z)

Product ID: HC9600FKR16H
Unit of Measure
1/EA
Min Order Qty
1
Element Series
HC9600
Nominal Length (Imperial)
16 in
Seal Material
Nitrile
Supralon GlassFiber 40 micron Fluorocarbon 16in 40.64cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 40 μm, GlassFiber, Length 16 inches

Product ID: HC9600FRR16Z
Unit of Measure
12/EA
Min Order Qty
12
Element Series
HC9600
Filter Removal Rating
40 micron
Nominal Length (Imperial)
16 in
Seal Material
Fluorocarbon
Supralon GlassFiber 40 micron Fluorocarbon 8in 20.32 cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 40 μm, GlassFiber, Length 8 Inches

Product ID: HCA125FRR8Z
Unit of Measure
1/EA
Min Order Qty
1
Filter Removal Rating
40 micron
Nominal Length (Imperial)
8 in
Seal Material
Fluorocarbon
Supralon GlassFiber 40 micron 8in 20.32cm product photo

Supralon™ Lube and Hydraulic Elements, Removal Rating 40 μm, GlassFiber, Length 8 inches

Product ID: HC9800FRR8YR26
Unit of Measure
6/EA
Min Order Qty
6
Element Series
HC9800
Filter Removal Rating
40 micron
Nominal Length (Imperial)
8 in
20 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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