Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Applications

Chill Haze Removal/Stabilization

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz EK 1 media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz EK 1 media, 5,0 m² Filter Area

Product ID: 7007931
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes
SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 100 media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 100 media, 5,0 m² Filter Area

Product ID: 7007891
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes
SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 150 media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 150 media, 5,0 m² Filter Area

Product ID: 7007900
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes
SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz EK media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz EK media, 5,0 m² Filter Area

Product ID: 7007879
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes
SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz KS 80 media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz KS 80 media, 5,0 m² Filter Area

Product ID: 7007883
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes
SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz KS 50 media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz KS 50 media, 5,0 m² Filter Area

Product ID: 7007897
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes
SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 250 media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 250 media, 5,0 m² Filter Area

Product ID: 7007889
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes
SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 700 media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 700 media, 5,0 m² Filter Area

Product ID: 7007899
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes
SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 200 media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 200 media, 5,0 m² Filter Area

Product ID: 7007925
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes
SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 900 media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 900 media, 5,0 m² Filter Area

Product ID: 7007942
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes
SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 300 media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 300 media, 5,0 m² Filter Area

Product ID: 7007932
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes
WSFZ housing for 16" modules product photo

WSFZ housing for 16" modules

Product ID: WSFZ162F31UT5J
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
710 mm
Cartridge Lock
Tie rod & Seal nut
Cartridge Style
Supradisc II
Design Pressure (barg)
0/8 @ 0/40 0/6,2 @ 0/150 Barg / T°C
Housing Height (Metric)
1250 mm
Nominal Diameter (Metric)
450 mm
See All Attributes
13 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English