Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Laboratory

0.2 µm, 0.02 m<sup>2</sup> (0.2 ft.2), suspended screen product photo

0.2 µm, 0.02 m2 (0.2 ft.2), suspended screen

Product ID: PSM20C11P2
Unit of Measure
1/EA
Min Order Qty
1
0.45 µm, 0.02 m<sup>2</sup> (0.2 ft.2), suspended screen product photo

0.45 µm, 0.02 m2 (0.2 ft.2), suspended screen

Product ID: PSM45C11P2
Unit of Measure
1/EA
Min Order Qty
1
0.4 - 1.0 μm, Bio 20 media product photo

0.4 - 1.0 μm, Bio 20 media

Product ID: NP6B0206
Unit of Measure
1/EA
Min Order Qty
1
1-place aluminum product photo

1-place aluminum

Product ID: 15408
Unit of Measure
1/EA
Min Order Qty
1
Supracap™ 50 depth filter capsule with single-layer media grade K100P (1-3 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade K100P (1-3 µm retention rating) and luer-lock connections

Product ID: SC050P100
Unit of Measure
1/EA
Min Order Qty
1
1-3 µm
Regenerated Cellulose
3 L
22 cm²
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1.0 µm glass fiber, short tips, natural product photo

1.0 µm glass fiber, short tips, natural

Product ID: 5073
Unit of Measure
1/EA
Min Order Qty
1
Filter Media
glass fiber (borosilicate glass)
Pore Size (Removal Rating)
1 µm
Sample Volume
80 μL
Height (Metric cm)
1.66 cm
Length (Metric cm)
12.78 cm
Plate Housing Material
polypropylene
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293 mm product photo

293 mm

Product ID: 66205
Unit of Measure
1/EA
Min Order Qty
1
293 mm product photo

293 mm

Product ID: 66229
Unit of Measure
1/EA
Min Order Qty
1
37 mm aluminum collar product photo

37 mm aluminum collar

Product ID: 96406
Unit of Measure
1/pkg
Min Order Qty
1
37 mm wave washer product photo

37 mm wave washer

Product ID: 99122
Unit of Measure
1/pkg
Min Order Qty
1
5K, tan product photo

5K, tan

Product ID: OS005C72
Unit of Measure
1/EA
Min Order Qty
1
MEP, HEA and PPA HyperCel Mixed-Mode Sorbents product photo

MEP, HEA and PPA HyperCel Mixed-Mode Sorbents

Product ID: 96WP3MIXM50
Unit of Measure
1/EA
Min Order Qty
1
20 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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