Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Emflon® PFRW Filter Cartridge, 0.2µm, 5 in, Single open ended Code 2, Silicone Elastomer O-ring product photoFEATURED

Emflon® PFRW Filter Cartridge, 0.2µm, 5 in, Single open ended Code 2, Silicone Elastomer O-ring

Product ID: AB05PFR2WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
4000 cm²
Filter Cartridge Style
Code 2
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
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Emflon® PFRW Filter Cartridge, 0.2µm, 10 in, Single open ended Code 7, Silicone Elastomer O-ring product photoFEATURED

Emflon® PFRW Filter Cartridge, 0.2µm, 10 in, Single open ended Code 7, Silicone Elastomer O-ring

Product ID: AB1PFR7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
8000 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Profile® II Filter Cartridges, 0.5 µm, 40 in, Single Open Ended Code 7, Silicone Elastomer O-ring product photo

Profile® II Filter Cartridges, 0.5 µm, 40 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB4Y0057WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Maximum Differential Pressure
4 bard @ < 30° C (86◦ F)
Cage, Core, Fin End and Endcap
Polypropylene
Food Contact Compliant
Yes
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SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz EK 1 media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz EK 1 media, 5,0 m² Filter Area

Product ID: 7007931
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
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Claris Filter Cartridge, 10 µm, 10 in, Double Open Ended with no endcaps product photo

Claris Filter Cartridge, 10 µm, 10 in, Double Open Ended with no endcaps

Product ID: CLR1010W480
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket O-Ring Code
Blank
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SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 100 media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 100 media, 5,0 m² Filter Area

Product ID: 7007891
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
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SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 150 media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 150 media, 5,0 m² Filter Area

Product ID: 7007900
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes
SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz EK media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz EK media, 5,0 m² Filter Area

Product ID: 7007879
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes
SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz KS 80 media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz KS 80 media, 5,0 m² Filter Area

Product ID: 7007883
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes
SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz KS 50 media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz KS 50 media, 5,0 m² Filter Area

Product ID: 7007897
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes
SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 250 media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 250 media, 5,0 m² Filter Area

Product ID: 7007889
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes
SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 700 media, 5,0 m² Filter Area product photo

SUPRAdisc II Module, 16", Flat Gasket, Silicone Seal, Seitz K 700 media, 5,0 m² Filter Area

Product ID: 7007899
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes
21 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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