Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter 30" Fluorodyne II 0.1µm product photo

Filter 30" Fluorodyne II 0.1µm

Product ID: AB3JSD7WH4
Unit of Measure
1/EA
Min Order Qty
1
Duo-Fine® , Filter Cartridges, Removal Rating 0.2 μm, Length 10 Inches product photo

Duo-Fine® , Filter Cartridges, Removal Rating 0.2 μm, Length 10 Inches

Product ID: DFN0210UE
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.2 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
Blank - DOE with elastomer gasket seals & end caps
Change Out Differential Pressure
2.4 bard
See All Attributes
Duo-Fine® , Filter Cartridges, Removal Rating 0.2 μm, Length 10 Inches, Nitrile, DOE with elastomer gasket seals & end caps product photo

Duo-Fine® , Filter Cartridges, Removal Rating 0.2 μm, Length 10 Inches, Nitrile, DOE with elastomer gasket seals & end caps

Product ID: DFN0210UN
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.2 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes
Duo-Fine® , Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, Fluorocarbon Elastomer product photo

Duo-Fine® , Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, Fluorocarbon Elastomer

Product ID: DFN0230AV
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes
Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 20 Inches, Nitrile product photo

Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 20 Inches, Nitrile

Product ID: DFNT0220UN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes
Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 10 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps product photo

Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 10 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT0210UN
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.2 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes
Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 10 Inches, silicone, SOE fin end external 226 O-rings product photo

Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 10 Inches, silicone, SOE fin end external 226 O-rings

Product ID: DFNT0210USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
End Configuration Code
M7
See All Attributes
Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 20 Inches, silicone, SOE fin end external 226 O-rings product photo

Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 20 Inches, silicone, SOE fin end external 226 O-rings

Product ID: DFNT0220USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
End Configuration
SOE fin end, external 226 O-rings
Change Out Differential Pressure
2.4 bard
Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, silicone, SOE fin end external 226 O-rings product photo

Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, silicone, SOE fin end external 226 O-rings

Product ID: DFNT0230USM7B334
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
End Configuration Code
M7
See All Attributes
Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps product photo

Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT0230UN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes
Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 9.75 Inches, Nitrile, SOE flat closed end external 222 O-rings product photo

Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 9.75 Inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: DFNT02975UNM3
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.2 µm
End Configuration
SOE flat closed end, external 222 O-rings
Change Out Differential Pressure
2.4 bard
Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, Nitrile, SOE fin end external 226 O-rings product photo

Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, Nitrile, SOE fin end external 226 O-rings

Product ID: DFNT0230UNM7
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
End Configuration
SOE fin end, external 226 O-rings
Change Out Differential Pressure
2.4 bard
2,839 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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