Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Cartridge Length (Metric)

762 mm

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXA2030UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer

Product ID: NXA2030UM7V
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 222 O-rings

Product ID: NXA2030UM8T
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Expanded PTFE (gaskets) FEP encapsulated silicone (O-rings)
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NXA 20-30U-M8F product photo

Nexis, NXA, 20 μm, 76.2 cm (30 in), SOE fin end, external 222 O-rings (retrofits other manufacturers’ Code 5), FEP encapsulated fluorocarbon elastomer (O-rings)

Product ID: NXA2030UM8F
Unit of Measure
12/EA
Min Order Qty
12
20 micron
NXA 20-30U product photo

Nexis, NXA, 20 μm, 76.2 cm (30 in), DOE industrial (no end caps)

Product ID: NXA2030U
Unit of Measure
12/EA
Min Order Qty
12
20 micron
Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT2030UM3E
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
EPDM
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXT2030UH21
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, EPDM, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, EPDM, SOE fin end external 222 O-rings

Product ID: NXT2030UM8E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
EPDM
See All Attributes
NXT 20-30U product photo

Nexis, NXT, 20 μm, 76.2 cm (30 in), DOE industrial (no end caps)

Product ID: NXT2030U
Unit of Measure
10/EA
Min Order Qty
10
20 micron
Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT2030UM7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 Inches, 316 stainless steel, Bulk packaging

Product ID: P020RW30S
Unit of Measure
10/EA
Min Order Qty
10
Bulk
See All Attributes
Poly-Fine® XLD Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® XLD Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: XLD2030UEM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
EPDM
See All Attributes
234 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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