Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Brand

DFT Classic®

Cartridge Length (Metric)

508 mm

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, Polypropylene, Individually wrapped product photo

1um, 20", 2.5 OD, Polypropylene Core, Individually wrapped

Product ID: U001AW20U1PK
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, 304 stainless steel, Bulk packaging

Product ID: C010AW20A
Unit of Measure
1/EA
Min Order Qty
1
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, 304 stainless steel

Product ID: RT010AW20A
Unit of Measure
1/EA
Min Order Qty
1
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 20 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 20 Inches, 316 stainless steel

Product ID: G100AW20S1PK
Unit of Measure
10/EA
Min Order Qty
10
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 150 μm, Length 20 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 150 μm, Length 20 Inches, Polypropylene

Product ID: U150AW20U
Unit of Measure
10/EA
Min Order Qty
10
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 20 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 20 Inches, 316 stainless steel, Bulk packaging

Product ID: C003AW20S
Unit of Measure
10/EA
Min Order Qty
10
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 20 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 20 Inches, 316 stainless steel, Bulk packaging

Product ID: C005AW20S
Unit of Measure
1/EA
Min Order Qty
1
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Bleached cotton, Length 20 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Bleached cotton, Length 20 Inches, 316 stainless steel, Bulk packaging

Product ID: C020AW20S
Unit of Measure
1/EA
Min Order Qty
1
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 20 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 20 Inches, 316 stainless steel, Bulk packaging

Product ID: C030AW20S
Unit of Measure
1/EA
Min Order Qty
1
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 20 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 20 Inches, 316 stainless steel, Bulk packaging

Product ID: C050AW20S
Unit of Measure
10/EA
Min Order Qty
10
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Bleached cotton, Length 20 Inches, Polypropylene, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Bleached cotton, Length 20 Inches, Polypropylene, Bulk packaging

Product ID: C050AW20U
Unit of Measure
1/EA
Min Order Qty
1
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Bleached cotton, Length 20 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Bleached cotton, Length 20 Inches, 304 stainless steel, Bulk packaging

Product ID: C050AW20A
Unit of Measure
1/EA
Min Order Qty
1
Bulk
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15 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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