Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Poly-Fine®

Poly-Fine® ARD, Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 Inches, EPDM product photo

Poly-Fine® ARD, Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 Inches, EPDM

Product ID: ARD0520UEDOE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer

Product ID: ARD130UVM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 Inches, DOE Santoprene gasket seal product photo

Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 Inches, DOE Santoprene gasket seal

Product ID: ARD120UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
H21
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 Inches, silicone, SOE fin end external 226 O-rings product photo

Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 Inches, silicone, SOE fin end external 226 O-rings

Product ID: ARD140USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: ARD140UVM3
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
1 µm
End Configuration
SOE flat closed end, external 222 O-rings
Change Out Differential Pressure
2.4 bard
Poly-Fine® ARD, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® ARD, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: ARD1010UEM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 Inches product photo

Poly-Fine® ARD, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 Inches

Product ID: ARD1020UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
H21
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 10 Inches product photo

Poly-Fine® ARD, Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 10 Inches

Product ID: ARD4010UEDOE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, EPDM, DOE with elastomer gasket seals and end caps product photo

Poly-Fine® ARD, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: ARD510UEDOE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
See All Attributes
Poly-Fine® ARD, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® ARD, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: ARD510UEM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
End Configuration
SOE flat closed end, external 222 O-rings
Change Out Differential Pressure
2.4 bard
Poly-Fine® ARD, Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 20 Inches, DOE Santoprene gasket seal product photo

Poly-Fine® ARD, Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 20 Inches, DOE Santoprene gasket seal

Product ID: ARD2020UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
H21
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches product photo

Poly-Fine® ARD, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches

Product ID: ARD320UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
H21
See All Attributes
13 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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