Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches

Product ID: PFT0830UGFMG7
Unit of Measure
1/EA
Min Order Qty
1
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, Silicone Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, Silicone Elastomer

Product ID: PFT0830USM4W480
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.8 µm
Membrane Material
Polypropylene
Industry-Specific Certification
W480 Food Contact
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings

Product ID: PFT0830UT
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.8 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, Ethylene Propylene Rubber product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, Ethylene Propylene Rubber

Product ID: PFT0840UESIW480
Unit of Measure
1/EA
Min Order Qty
1
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, EPDM, DOE industrial

Product ID: PFT0840UE
Unit of Measure
1/EA
Min Order Qty
1
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, silicone, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, silicone, SOE fin end external 226 O-rings

Product ID: PFT0840USM7
Unit of Measure
1/EA
Min Order Qty
1
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 4 Inches, EPDM product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 4 Inches, EPDM

Product ID: PFT084UE
Unit of Measure
1/EA
Min Order Qty
1
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: PFT0840UVM3
Unit of Measure
1/EA
Min Order Qty
1
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 226 O-rings

Product ID: PFT0840UTM7
Unit of Measure
1/EA
Min Order Qty
1
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 4 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 4 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings

Product ID: PFT084UTM3
Unit of Measure
1/EA
Min Order Qty
1
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 9.75 Inches, silicone product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 9.75 Inches, silicone

Product ID: PFT08975USM20
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.8 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE fin end external 226 O-rings

Product ID: PFTQ0810UFM712
Unit of Measure
12/EA
Min Order Qty
12
0.8 µm
4,234 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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