Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 4 Inches, FEP encapsulated Fluorocarbon Elastomer Orings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 4 Inches, FEP encapsulated Fluorocarbon Elastomer Orings

Product ID: PFT024UFM3
Unit of Measure
1/EA
Min Order Qty
1
0.2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 5 Inches, SOE internal O-ring closed end with deep recess product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 5 Inches, SOE internal O-ring closed end with deep recess

Product ID: PFT025USM20
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Highly Asymetric Polysulfone
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 9.75 Inches, silicone, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 9.75 Inches, silicone, SOE flat closed end external 222 O-rings

Product ID: PFT02975USM3
Unit of Measure
1/EA
Min Order Qty
1
0.2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Polypropylene, Length 20 Inches product photo

PolyFine-II Filter Cartridge, Polyproylene, 0.2 µm, 20 in, Fluorocarbon elastomer, M3

Product ID: PFT02HA20UVM3B623
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 20 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 20 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 222 O-rings

Product ID: PFTQ0220UTM812
Unit of Measure
1/EA
Min Order Qty
1
0.2 µm
Supracap™ 50 depth filter capsule with single-layer media grade BIO 10 (0.2-0.4 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade BIO 10 (0.2-0.4 µm retention rating) and luer-lock connections

Product ID: SC050B010
Unit of Measure
1/EA
Min Order Qty
1
0.2-0.4 µm
Cellulose
3 L
22 cm²
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Supracap™ 50 depth filter capsule with dual-layer media grade PDD2 (0.2-0.8 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDD2 (0.2-0.8 µm retention rating) and luer-lock connections

Product ID: SC050PDD2
Unit of Measure
1/EA
Min Order Qty
1
0.2-0.8 µm
Regenerated Cellulose
3 L
22 cm²
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Supracap™ 50 depth filter capsule with dual-layer media grade PDL3 (0.2-3 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDL3 (0.2-3 µm retention rating) and luer-lock connections

Product ID: SC050PDL3
Unit of Measure
1/EA
Min Order Qty
1
0.2-3 µm
Regenerated Cellulose
3 L
22 cm²
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Supracap™ 50 depth filter capsule with dual-layer media grade PDE2 (0.2-3.5 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with dual-layer media grade PDE2 (0.2-3.5 µm retention rating) and luer-lock connections

Product ID: SC050PDE2
Unit of Measure
1/EA
Min Order Qty
1
0.2-3.5 µm
Regenerated Cellulose
3 L
22 cm²
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Supracap™ 50 depth filter capsule with single-layer media grade SUPRA EK1P (0.2-0.5 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade SUPRA EK1P (0.2-0.5 µm retention rating) and luer-lock connections

Product ID: SC050PEK1
Unit of Measure
1/EA
Min Order Qty
1
0.2-0.5 µm
Regenerated Cellulose
3 L
22 cm²
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Supracap™ 50 depth filter capsule with single-layer media grade EKMP (0.2-0.5 µm retention rating) and luer-lock connections product photo

Supracap™ 50 depth filter capsule with single-layer media grade EKMP (0.2-0.5 µm retention rating) and luer-lock connections

Product ID: SC050PEKM
Unit of Measure
1/EA
Min Order Qty
1
0.2-0.5 µm
Regenerated Cellulose
3 L
22 cm²
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Duo-Fine® , Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, Fluorocarbon Elastomer product photo

Duo-Fine® , Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, Fluorocarbon Elastomer

Product ID: DFN0230AV
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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4,234 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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